Polycrystalline ZrB2 coating prepared on graphite by chemical vapor deposition

Peng Wang; Yushi Qi; Shanbao Zhou; Ping Hu; Guiqing Chen; Xinghong Zhang; Wenbo Han

doi:10.1002/pssb.201552752

Polycrystalline ZrB₂ coating prepared on graphite by chemical vapor deposition

Peng Wang^*
, Yushi Qi
, Shanbao Zhou
, Ping Hu
, Guiqing Chen
, Xinghong Zhang
, Wenbo Han

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology
University of Jinan

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

Polycrystalline ZrB₂ coating was prepared on graphite by chemical vapor deposition (CVD) using a gas mixture of ZrCl₄, BCl₃, H₂, and Ar at 1200 °C. The microstructure and phase composition of the coating were investigated. The results indicated that the coating structure was loose. ZrO₂ and B₂O₃ detected on the surface of ZrB₂ grains were formed by oxidation due to exposure to air. Some adsorbed oxygen, nitrogen, and water vapor was also detected on the surface of ZrB₂ grains. The feasibility of preparation of ZrB₂ on graphite by CVD using ZrCl₄, BCl₃, and H₂ was verified.

Original language	English
Pages (from-to)	1590-1595
Number of pages	6
Journal	Physica Status Solidi (B): Basic Research
Volume	253
Issue number	8
DOIs	https://doi.org/10.1002/pssb.201552752
State	Published - 1 Aug 2016

Keywords

ZrB
chemical vapor deposition
coatings
zirconium diboride

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10.1002/pssb.201552752

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title = "Polycrystalline ZrB2 coating prepared on graphite by chemical vapor deposition",

abstract = "Polycrystalline ZrB2 coating was prepared on graphite by chemical vapor deposition (CVD) using a gas mixture of ZrCl4, BCl3, H2, and Ar at 1200 °C. The microstructure and phase composition of the coating were investigated. The results indicated that the coating structure was loose. ZrO2 and B2O3 detected on the surface of ZrB2 grains were formed by oxidation due to exposure to air. Some adsorbed oxygen, nitrogen, and water vapor was also detected on the surface of ZrB2 grains. The feasibility of preparation of ZrB2 on graphite by CVD using ZrCl4, BCl3, and H2 was verified.",

keywords = "ZrB, chemical vapor deposition, coatings, zirconium diboride",

author = "Peng Wang and Yushi Qi and Shanbao Zhou and Ping Hu and Guiqing Chen and Xinghong Zhang and Wenbo Han",

note = "Publisher Copyright: {\textcopyright} 2016 WILEY-VCH Verlag GmbH \& Co. KGaA, Weinheim",

year = "2016",

month = aug,

day = "1",

doi = "10.1002/pssb.201552752",

language = "英语",

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pages = "1590--1595",

journal = "Physica Status Solidi (B): Basic Research",

issn = "0370-1972",

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TY - JOUR

T1 - Polycrystalline ZrB2 coating prepared on graphite by chemical vapor deposition

AU - Wang, Peng

AU - Qi, Yushi

AU - Zhou, Shanbao

AU - Hu, Ping

AU - Chen, Guiqing

AU - Zhang, Xinghong

AU - Han, Wenbo

PY - 2016/8/1

Y1 - 2016/8/1

N2 - Polycrystalline ZrB2 coating was prepared on graphite by chemical vapor deposition (CVD) using a gas mixture of ZrCl4, BCl3, H2, and Ar at 1200 °C. The microstructure and phase composition of the coating were investigated. The results indicated that the coating structure was loose. ZrO2 and B2O3 detected on the surface of ZrB2 grains were formed by oxidation due to exposure to air. Some adsorbed oxygen, nitrogen, and water vapor was also detected on the surface of ZrB2 grains. The feasibility of preparation of ZrB2 on graphite by CVD using ZrCl4, BCl3, and H2 was verified.

AB - Polycrystalline ZrB2 coating was prepared on graphite by chemical vapor deposition (CVD) using a gas mixture of ZrCl4, BCl3, H2, and Ar at 1200 °C. The microstructure and phase composition of the coating were investigated. The results indicated that the coating structure was loose. ZrO2 and B2O3 detected on the surface of ZrB2 grains were formed by oxidation due to exposure to air. Some adsorbed oxygen, nitrogen, and water vapor was also detected on the surface of ZrB2 grains. The feasibility of preparation of ZrB2 on graphite by CVD using ZrCl4, BCl3, and H2 was verified.

KW - ZrB

KW - chemical vapor deposition

KW - coatings

KW - zirconium diboride

UR - https://www.scopus.com/pages/publications/84962840667

U2 - 10.1002/pssb.201552752

DO - 10.1002/pssb.201552752

M3 - 文章

AN - SCOPUS:84962840667

SN - 0370-1972

VL - 253

SP - 1590

EP - 1595

JO - Physica Status Solidi (B): Basic Research

JF - Physica Status Solidi (B): Basic Research

IS - 8

ER -

Polycrystalline ZrB₂ coating prepared on graphite by chemical vapor deposition

Abstract

Keywords

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