Plasma implantation based surface modification of metals with single-implantation mode

X. B. Tian; J. T. Cui; S. Q. Yang; Ricky K.Y. Fu; Paul K. Chu

doi:10.1117/12.607376

Plasma implantation based surface modification of metals with single-implantation mode

X. B. Tian^*
, J. T. Cui
, S. Q. Yang
, Ricky K.Y. Fu
, Paul K. Chu

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

Abstract

Plasma ion implantation has proven to be an effective surface modification technique. Its biggest advantage is the capability to treat the objects with irregular shapes without complex manipulation of target holder. Many metal materials such as aluminum, stainless steel, tool steel, titanium, magnesium etc, has been treated using this technique to improve their wear-resistance, corrosion-resistance, fatigue-resistance, oxidation-resistance, bio-compatiblity etc. However in order to achieve thicker modified layers, hybrid processes combining plasma ion implantation with other techniques have been frequently employed. In this paper plasma implantation based surface modification of metals using single-implantation mode is reviewed.

Original language	English
Article number	75
Pages (from-to)	324-329
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5774
DOIs	https://doi.org/10.1117/12.607376
State	Published - 2005
Externally published	Yes
Event	Fifth International Conference on Thin Film Physics and Applications - Shanghai, China Duration: 31 May 2004 → 2 Jun 2004

Keywords

Biocompatibility
Corrosion-resistance
Metals
Nitrogen plasma
Oxidation-resistance
Plasma ion implantation
Wear-resistance

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10.1117/12.607376

Cite this

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title = "Plasma implantation based surface modification of metals with single-implantation mode",

abstract = "Plasma ion implantation has proven to be an effective surface modification technique. Its biggest advantage is the capability to treat the objects with irregular shapes without complex manipulation of target holder. Many metal materials such as aluminum, stainless steel, tool steel, titanium, magnesium etc, has been treated using this technique to improve their wear-resistance, corrosion-resistance, fatigue-resistance, oxidation-resistance, bio-compatiblity etc. However in order to achieve thicker modified layers, hybrid processes combining plasma ion implantation with other techniques have been frequently employed. In this paper plasma implantation based surface modification of metals using single-implantation mode is reviewed.",

keywords = "Biocompatibility, Corrosion-resistance, Metals, Nitrogen plasma, Oxidation-resistance, Plasma ion implantation, Wear-resistance",

author = "Tian, \{X. B.\} and Cui, \{J. T.\} and Yang, \{S. Q.\} and Fu, \{Ricky K.Y.\} and Chu, \{Paul K.\}",

year = "2005",

doi = "10.1117/12.607376",

language = "英语",

volume = "5774",

pages = "324--329",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Fifth International Conference on Thin Film Physics and Applications ; Conference date: 31-05-2004 Through 02-06-2004",

}

TY - JOUR

T1 - Plasma implantation based surface modification of metals with single-implantation mode

AU - Tian, X. B.

AU - Cui, J. T.

AU - Yang, S. Q.

AU - Fu, Ricky K.Y.

AU - Chu, Paul K.

PY - 2005

Y1 - 2005

N2 - Plasma ion implantation has proven to be an effective surface modification technique. Its biggest advantage is the capability to treat the objects with irregular shapes without complex manipulation of target holder. Many metal materials such as aluminum, stainless steel, tool steel, titanium, magnesium etc, has been treated using this technique to improve their wear-resistance, corrosion-resistance, fatigue-resistance, oxidation-resistance, bio-compatiblity etc. However in order to achieve thicker modified layers, hybrid processes combining plasma ion implantation with other techniques have been frequently employed. In this paper plasma implantation based surface modification of metals using single-implantation mode is reviewed.

AB - Plasma ion implantation has proven to be an effective surface modification technique. Its biggest advantage is the capability to treat the objects with irregular shapes without complex manipulation of target holder. Many metal materials such as aluminum, stainless steel, tool steel, titanium, magnesium etc, has been treated using this technique to improve their wear-resistance, corrosion-resistance, fatigue-resistance, oxidation-resistance, bio-compatiblity etc. However in order to achieve thicker modified layers, hybrid processes combining plasma ion implantation with other techniques have been frequently employed. In this paper plasma implantation based surface modification of metals using single-implantation mode is reviewed.

KW - Biocompatibility

KW - Corrosion-resistance

KW - Metals

KW - Nitrogen plasma

KW - Oxidation-resistance

KW - Plasma ion implantation

KW - Wear-resistance

UR - https://www.scopus.com/pages/publications/25644452137

U2 - 10.1117/12.607376

DO - 10.1117/12.607376

M3 - 会议文章

AN - SCOPUS:25644452137

SN - 0277-786X

VL - 5774

SP - 324

EP - 329

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 75

T2 - Fifth International Conference on Thin Film Physics and Applications

Y2 - 31 May 2004 through 2 June 2004

ER -

Plasma implantation based surface modification of metals with single-implantation mode

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Keywords

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