Plasma immersion ion implantation

Lifang Xia; Yue Sun; Xinxin Ma

Plasma immersion ion implantation

Lifang Xia^*
, Yue Sun
, Xinxin Ma

^*Corresponding author for this work

School of Materials Science and Engineering

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

The principle, features, application and trend of development of plasma immersion ion implantation were summarized.

Original language	English
Pages (from-to)	3-6
Number of pages	4
Journal	Lizi Jiaohuan Yu Xifu/Ion Exchange and Adsorption
Volume	11
Issue number	1
State	Published - 1 Jan 1995

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title = "Plasma immersion ion implantation",

abstract = "The principle, features, application and trend of development of plasma immersion ion implantation were summarized.",

author = "Lifang Xia and Yue Sun and Xinxin Ma",

year = "1995",

month = jan,

day = "1",

language = "英语",

volume = "11",

pages = "3--6",

journal = "Lizi Jiaohuan Yu Xifu/Ion Exchange and Adsorption",

issn = "1001-5493",

publisher = "Tianjin Nankai Daxue",

number = "1",

}

TY - JOUR

T1 - Plasma immersion ion implantation

AU - Xia, Lifang

AU - Sun, Yue

AU - Ma, Xinxin

PY - 1995/1/1

Y1 - 1995/1/1

N2 - The principle, features, application and trend of development of plasma immersion ion implantation were summarized.

AB - The principle, features, application and trend of development of plasma immersion ion implantation were summarized.

UR - https://www.scopus.com/pages/publications/0029241363

M3 - 文章

AN - SCOPUS:0029241363

SN - 1001-5493

VL - 11

SP - 3

EP - 6

JO - Lizi Jiaohuan Yu Xifu/Ion Exchange and Adsorption

JF - Lizi Jiaohuan Yu Xifu/Ion Exchange and Adsorption

IS - 1

ER -

Plasma immersion ion implantation

Abstract

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