Planar parallel manipulator based MEMS device bonding system

Aimed at the high velocity, high precision and high flexibility requirements, a manipulator of planar parallel structure is developed to substitute for ordinary X - Y table, in addition the machine vision is implemented to improve the system's flexibility. The initial angular positions of the joints are estimated by the extended Kalman filter algorithm, then the manipulator's absolute locating accuracy in its workspace is guaranteed indirectly. For any MEMS device, the bonding system itself can be used as measurement equipment to create the device's geometry model, which is the base to do off-line programming. An ideal trade-off between the system's flexibility and efficiency is got.