Phase composition of 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 film deposited by radio frequency magnetron sputtering

J. M. Wang; W. L. Li; W. D. Fei

doi:10.1016/j.jmatprotec.2008.02.003

Phase composition of 0.7Pb(Mg_1/3Nb_2/3)O₃-0.3PbTiO₃ film deposited by radio frequency magnetron sputtering

J. M. Wang
, W. L. Li
, W. D. Fei^*

^*Corresponding author for this work

School of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

The 0.7Pb(Mg_1/3Nb_2/3)O₃-0.3PbTiO₃ (PMN-PT) films were prepared by radio frequency magnetron sputtering deposited on Pt/Ti/SiO₂/Si substrate. The paper aims to study the effect of sputtering gas and the effect of annealing temperature on perovskite phase formation. Phase compositions were analyzed by X-ray diffraction and the surface morphologies of the films were characterized by scanning electronic microscopy. The polarization behavior of PMN-PT films was measured using the Radiant Technologies RT6000 ferroelectric test system. The results indicate that the appropriate sputtering gas contribute to the formation of pure-perovskite phase at the appropriate post-annealing temperature.

Original language	English
Pages (from-to)	343-347
Number of pages	5
Journal	Journal of Materials Processing Technology
Volume	209
Issue number	1
DOIs	https://doi.org/10.1016/j.jmatprotec.2008.02.003
State	Published - 1 Jan 2009

Keywords

PMN-PT
Perovskite phase
Radio-frequency-magnetron sputtering
processing gas

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10.1016/j.jmatprotec.2008.02.003

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title = "Phase composition of 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 film deposited by radio frequency magnetron sputtering",

abstract = "The 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 (PMN-PT) films were prepared by radio frequency magnetron sputtering deposited on Pt/Ti/SiO2/Si substrate. The paper aims to study the effect of sputtering gas and the effect of annealing temperature on perovskite phase formation. Phase compositions were analyzed by X-ray diffraction and the surface morphologies of the films were characterized by scanning electronic microscopy. The polarization behavior of PMN-PT films was measured using the Radiant Technologies RT6000 ferroelectric test system. The results indicate that the appropriate sputtering gas contribute to the formation of pure-perovskite phase at the appropriate post-annealing temperature.",

keywords = "PMN-PT, Perovskite phase, Radio-frequency-magnetron sputtering, processing gas",

author = "Wang, \{J. M.\} and Li, \{W. L.\} and Fei, \{W. D.\}",

year = "2009",

month = jan,

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doi = "10.1016/j.jmatprotec.2008.02.003",

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TY - JOUR

T1 - Phase composition of 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 film deposited by radio frequency magnetron sputtering

AU - Wang, J. M.

AU - Li, W. L.

AU - Fei, W. D.

PY - 2009/1/1

Y1 - 2009/1/1

N2 - The 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 (PMN-PT) films were prepared by radio frequency magnetron sputtering deposited on Pt/Ti/SiO2/Si substrate. The paper aims to study the effect of sputtering gas and the effect of annealing temperature on perovskite phase formation. Phase compositions were analyzed by X-ray diffraction and the surface morphologies of the films were characterized by scanning electronic microscopy. The polarization behavior of PMN-PT films was measured using the Radiant Technologies RT6000 ferroelectric test system. The results indicate that the appropriate sputtering gas contribute to the formation of pure-perovskite phase at the appropriate post-annealing temperature.

AB - The 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 (PMN-PT) films were prepared by radio frequency magnetron sputtering deposited on Pt/Ti/SiO2/Si substrate. The paper aims to study the effect of sputtering gas and the effect of annealing temperature on perovskite phase formation. Phase compositions were analyzed by X-ray diffraction and the surface morphologies of the films were characterized by scanning electronic microscopy. The polarization behavior of PMN-PT films was measured using the Radiant Technologies RT6000 ferroelectric test system. The results indicate that the appropriate sputtering gas contribute to the formation of pure-perovskite phase at the appropriate post-annealing temperature.

KW - PMN-PT

KW - Perovskite phase

KW - Radio-frequency-magnetron sputtering

KW - processing gas

UR - https://www.scopus.com/pages/publications/53949086276

U2 - 10.1016/j.jmatprotec.2008.02.003

DO - 10.1016/j.jmatprotec.2008.02.003

M3 - 文章

AN - SCOPUS:53949086276

SN - 0924-0136

VL - 209

SP - 343

EP - 347

JO - Journal of Materials Processing Technology

JF - Journal of Materials Processing Technology

IS - 1

ER -

Phase composition of 0.7Pb(Mg_1/3Nb_2/3)O₃-0.3PbTiO₃ film deposited by radio frequency magnetron sputtering

Abstract

Keywords

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