Particle-in-cell simulation of plasma ion implantation based on software package MATLAB

The plasma ion implantation for irregular-shaped objects was simulated in particle-in-cell (PIC) mode with the software package MATLAB. The interpolation functions and Partial Differential Equation (PDE) toolbox of MATLAB were used to realize the PIC simulation of plasma ion implantation inside a square tube. The impact of the inner-electrode's size on the average implantation energy was evaluated. The "clamp" effect of the inner wall strongly influences the field distribution inside the tube; and a larger area leads to a higher average implantation-energy. The simulated results show that biased at a fixed voltage, the strong "clamping" of the electrode with large surface area results in a fairly high average implantation-energy. The simulated results with MATLAB agree well with those calculated in other conventional methods. Besides, the initial sheath configurations on a rod with heart-shaped cross-section or inside a dovetail slot were also simulated.