Overview of the Development of Planar Motor Technology

With the rapid development of the semiconductor chip and precision machining industry, there is a growing demand for high-performance planar drive devices, leading to an increasing depth of research on planar motors. Variable reluctance planar motors, induction planar motors, permanent-magnet synchronous planar motors and DC planar motors are discussed in this paper along with their working principles and current research status. The theory of planar motors remains incomplete and immature despite the extensive research conducted by scholars and research institutions on crucial aspects like magnetic field analysis and electromagnetic force calculations. The objective of this paper is to provide a comprehensive review of the research and development status of planar motors in order to positively impact future advancements in this field.