Output feedback integral control for nano-positioning using piezoelectric actuators

This paper proposes a robust output feedback controller for a piezoelectrically actuated system with only position sensor. This considered piezoelectric actuator (PEA) system is subjected to model imperfection, creep nonlinearity, hysteresis nonlinearity and other external effects. The designed controller employs a second-order auxiliary system and a discontinuous uncertainty and disturbance estimation term to generate filtered error signals and to compensate for the model uncertainties and system disturbance, respectively. The global stability of the proposed controller is proved through Lyapunov-based stability analysis. The feasibility and effectiveness of the proposed control approach are verified experimentally using a PEA stage. Results demonstrate that both set-point and tracking control without/with external loads are realized with good performance and the PEA system with high-accuracy can be achieved. Moreover, the robustness of the controller is verified and analyzed through the sinusoidal tracking with external disturbance.