TY - GEN
T1 - Optimization of super-long CNT forests growth on conductive substrate by water assisted CVD
AU - Wang, Peng Bo
AU - Xu, De Yang
AU - Sun, Li Ning
PY - 2014
Y1 - 2014
N2 - Water assisted chemical vapor deposition (CVD) is used widely to synthesize super long, vertically aligned, densely packed carbon nanotube (CNT) forests. Various water assisted CVD parameters give the important influence on the quality of CNT forests. In this paper, several main parameters in water assisted CVD are optimized, such as the flow rate of H2, the content of water and growth temperature. Furthermore, growth on the conductive substrate is also studied by water assisted CVD. Under optimum condition with 10 minutes growth, the length of CNT forests could be 815 μm on silicon substrate and 369 μm on conductive substrate.
AB - Water assisted chemical vapor deposition (CVD) is used widely to synthesize super long, vertically aligned, densely packed carbon nanotube (CNT) forests. Various water assisted CVD parameters give the important influence on the quality of CNT forests. In this paper, several main parameters in water assisted CVD are optimized, such as the flow rate of H2, the content of water and growth temperature. Furthermore, growth on the conductive substrate is also studied by water assisted CVD. Under optimum condition with 10 minutes growth, the length of CNT forests could be 815 μm on silicon substrate and 369 μm on conductive substrate.
KW - CNT forest
KW - Chemical vapor deposition
KW - Growth
KW - Parameters optimization
UR - https://www.scopus.com/pages/publications/84893929671
U2 - 10.4028/www.scientific.net/AMM.496-500.536
DO - 10.4028/www.scientific.net/AMM.496-500.536
M3 - 会议稿件
AN - SCOPUS:84893929671
SN - 9783037859926
T3 - Applied Mechanics and Materials
SP - 536
EP - 540
BT - Frontiers of Manufacturing and Design Science IV
T2 - 4th International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2013
Y2 - 10 September 2013 through 12 September 2013
ER -