TY - GEN
T1 - Optimization analysis of ultra-precision flying-Tool cutting machine for optical elements
AU - Zhu, Shenggen
AU - Zhang, Feihu
AU - Bai, Jinfeng
AU - Zhao, Lingyu
AU - Zhao, Huiying
N1 - Publisher Copyright:
© COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.
PY - 2021
Y1 - 2021
N2 - With the development of the modern state of optical engineering, large diameter (400×400 mm) of optical element processing and its whole surface shape accuracy is 0.1 micron (λ/ 6). It's on special crystal material single point diamond fly knife cutting ultra-precision machine tools put forward higher request, the bed is equipped with stable, the lathe bed equipment for the foundation design, and set the parts of the material. We think about the precision analysis of the external influencing factors of equipment, and design the model of equipment bed. In the bed model, the static simulation analysis is made under the two schemes of basic design and optimized reinforcement, respectively. And we compared the necessary design model and optimized design model. The total deformation was 0.409 microns for bed base, 0.268 microns for oblique rib, and 0.312 microns for circular rib. And we analyzed the deformation in X, Y and Z directions.
AB - With the development of the modern state of optical engineering, large diameter (400×400 mm) of optical element processing and its whole surface shape accuracy is 0.1 micron (λ/ 6). It's on special crystal material single point diamond fly knife cutting ultra-precision machine tools put forward higher request, the bed is equipped with stable, the lathe bed equipment for the foundation design, and set the parts of the material. We think about the precision analysis of the external influencing factors of equipment, and design the model of equipment bed. In the bed model, the static simulation analysis is made under the two schemes of basic design and optimized reinforcement, respectively. And we compared the necessary design model and optimized design model. The total deformation was 0.409 microns for bed base, 0.268 microns for oblique rib, and 0.312 microns for circular rib. And we analyzed the deformation in X, Y and Z directions.
KW - Optical elements
KW - Optimize the design
KW - Precision distribution
KW - The simulation analysis
UR - https://www.scopus.com/pages/publications/85100149708
U2 - 10.1117/12.2586854
DO - 10.1117/12.2586854
M3 - 会议稿件
AN - SCOPUS:85100149708
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Fourth International Conference on Photonics and Optical Engineering
A2 - She, Jiangbo
PB - SPIE
T2 - 4th International Conference on Photonics and Optical Engineering
Y2 - 15 October 2020 through 16 October 2020
ER -