Optical properties of ZNO film by plasma-assisted MOCVD

Xinqiang Wang; Shuren Yang; Jinzhong Wang; Jingzhi Yin; Xiuying Jiang; Guotong Du

Optical properties of ZNO film by plasma-assisted MOCVD

Xinqiang Wang^*
, Shuren Yang
, Jinzhong Wang
, Jingzhi Yin
, Xiuying Jiang
, Guotong Du

^*Corresponding author for this work

Jilin University

Research output: Contribution to conference › Paper › peer-review

Abstract

Optical properties of N-doped and non-doped ZnO film were investigated using plasma-assisted metallorganic chemical vapor deposition (MOCVD). The absorption measurement of the samples was conducted using UV-3100 recording photometer while Raman measurement of the samples was conducted in back-scattering configuration using 514.5 nm Ar⁺ laser line excitation. The results show that N-doped ZnO film is in better crystal quality and optical characteristic and the resistivity of N-doped film is higher with respect to non-doped ZnO film.

Original language	English
Pages	I540-I541
State	Published - 2001
Externally published	Yes
Event	4th Pacific Rim Conference on Lasers and Electro-Optics - Chiba, Japan Duration: 15 Jul 2001 → 19 Jul 2001

Conference

Conference	4th Pacific Rim Conference on Lasers and Electro-Optics
Country/Territory	Japan
City	Chiba
Period	15/07/01 → 19/07/01

Cite this

@conference{2d1dd53865574f588d524eeeeccf016e,

title = "Optical properties of ZNO film by plasma-assisted MOCVD",

abstract = "Optical properties of N-doped and non-doped ZnO film were investigated using plasma-assisted metallorganic chemical vapor deposition (MOCVD). The absorption measurement of the samples was conducted using UV-3100 recording photometer while Raman measurement of the samples was conducted in back-scattering configuration using 514.5 nm Ar+ laser line excitation. The results show that N-doped ZnO film is in better crystal quality and optical characteristic and the resistivity of N-doped film is higher with respect to non-doped ZnO film.",

author = "Xinqiang Wang and Shuren Yang and Jinzhong Wang and Jingzhi Yin and Xiuying Jiang and Guotong Du",

year = "2001",

language = "英语",

pages = "I540--I541",

note = "4th Pacific Rim Conference on Lasers and Electro-Optics ; Conference date: 15-07-2001 Through 19-07-2001",

}

TY - CONF

T1 - Optical properties of ZNO film by plasma-assisted MOCVD

AU - Wang, Xinqiang

AU - Yang, Shuren

AU - Wang, Jinzhong

AU - Yin, Jingzhi

AU - Jiang, Xiuying

AU - Du, Guotong

PY - 2001

Y1 - 2001

N2 - Optical properties of N-doped and non-doped ZnO film were investigated using plasma-assisted metallorganic chemical vapor deposition (MOCVD). The absorption measurement of the samples was conducted using UV-3100 recording photometer while Raman measurement of the samples was conducted in back-scattering configuration using 514.5 nm Ar+ laser line excitation. The results show that N-doped ZnO film is in better crystal quality and optical characteristic and the resistivity of N-doped film is higher with respect to non-doped ZnO film.

AB - Optical properties of N-doped and non-doped ZnO film were investigated using plasma-assisted metallorganic chemical vapor deposition (MOCVD). The absorption measurement of the samples was conducted using UV-3100 recording photometer while Raman measurement of the samples was conducted in back-scattering configuration using 514.5 nm Ar+ laser line excitation. The results show that N-doped ZnO film is in better crystal quality and optical characteristic and the resistivity of N-doped film is higher with respect to non-doped ZnO film.

UR - https://www.scopus.com/pages/publications/0035693025

M3 - 论文

AN - SCOPUS:0035693025

SP - I540-I541

T2 - 4th Pacific Rim Conference on Lasers and Electro-Optics

Y2 - 15 July 2001 through 19 July 2001

ER -

Optical properties of ZNO film by plasma-assisted MOCVD

Abstract

Conference

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