Optical intensity far-field distribution of MEMS micro-mirror arrays by Fraunhofer diffraction

Bin Zhang; Yu Zhang; Guohui Yang; Chunhui Wang

doi:10.35848/1882-0786/ac25c6

Optical intensity far-field distribution of MEMS micro-mirror arrays by Fraunhofer diffraction

Bin Zhang
, Yu Zhang
, Guohui Yang
, Chunhui Wang

School of Astronautics

Harbin Institute of Technology
School of Electronics and Information Engineering, Harbin Institute of Technology
Geling Institute of Artificial Intelligence and Robotics

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

MEMS mirror arrays perform superior than MEMS mirror to assemble a Lidar, but few published papers about the optical intensity and distributions when laser diffracted by MEMS arrays are available, this letter focuses on the issues. Firstly, the complex amplitudes of laser which is diffracted by 1D (dimension) and 2D arrays are presented, respectively. Then we give the optical intensity and distributions on the observation plane. Finally, the simulation diagrams of these distributions are shown, and the correctness of the results is verified by Lumerical FDTD Solutions simulations and Young's double-slit experiment.

Original language	English
Article number	102006
Journal	Applied Physics Express
Volume	14
Issue number	10
DOIs	https://doi.org/10.35848/1882-0786/ac25c6
State	Published - Oct 2021

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title = "Optical intensity far-field distribution of MEMS micro-mirror arrays by Fraunhofer diffraction",

abstract = "MEMS mirror arrays perform superior than MEMS mirror to assemble a Lidar, but few published papers about the optical intensity and distributions when laser diffracted by MEMS arrays are available, this letter focuses on the issues. Firstly, the complex amplitudes of laser which is diffracted by 1D (dimension) and 2D arrays are presented, respectively. Then we give the optical intensity and distributions on the observation plane. Finally, the simulation diagrams of these distributions are shown, and the correctness of the results is verified by Lumerical FDTD Solutions simulations and Young's double-slit experiment.",

author = "Bin Zhang and Yu Zhang and Guohui Yang and Chunhui Wang",

note = "Publisher Copyright: {\textcopyright} 2021 The Japan Society of Applied Physics.",

year = "2021",

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AU - Zhang, Bin

AU - Zhang, Yu

AU - Yang, Guohui

AU - Wang, Chunhui

PY - 2021/10

Y1 - 2021/10

N2 - MEMS mirror arrays perform superior than MEMS mirror to assemble a Lidar, but few published papers about the optical intensity and distributions when laser diffracted by MEMS arrays are available, this letter focuses on the issues. Firstly, the complex amplitudes of laser which is diffracted by 1D (dimension) and 2D arrays are presented, respectively. Then we give the optical intensity and distributions on the observation plane. Finally, the simulation diagrams of these distributions are shown, and the correctness of the results is verified by Lumerical FDTD Solutions simulations and Young's double-slit experiment.

AB - MEMS mirror arrays perform superior than MEMS mirror to assemble a Lidar, but few published papers about the optical intensity and distributions when laser diffracted by MEMS arrays are available, this letter focuses on the issues. Firstly, the complex amplitudes of laser which is diffracted by 1D (dimension) and 2D arrays are presented, respectively. Then we give the optical intensity and distributions on the observation plane. Finally, the simulation diagrams of these distributions are shown, and the correctness of the results is verified by Lumerical FDTD Solutions simulations and Young's double-slit experiment.

UR - https://www.scopus.com/pages/publications/85116870252

U2 - 10.35848/1882-0786/ac25c6

DO - 10.35848/1882-0786/ac25c6

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VL - 14

JO - Applied Physics Express

JF - Applied Physics Express

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M1 - 102006

ER -

Optical intensity far-field distribution of MEMS micro-mirror arrays by Fraunhofer diffraction

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