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Optical fiber confocal interference technique

  • Limin Zou*
  • , Xuemei Ding
  • *Corresponding author for this work
  • Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The article presents an optic-fiber confocal interference microscopy system based on Makel interference principle(FOCSIM), and its 3D transfer function of system. According to the axial response function of system, analyses the influence factors of axial resolution, and optimizes FOCSIM by selecting lens. Experimental results show that the FOCSIM has better resolution and stability than general confocal microscopy. According to analyzing the imaging theory of fibre-optical confocal scanning interference microscopy, we have obtain the reason Theoretical study explains why the resolution of FOCSIM is higher than that of the conventional method with a confocal scanning microscope in theory.

Original languageEnglish
Title of host publicationProceedings of the Second International Symposium on Instrumentation Science and Technology
EditorsT. Jiubin, W. Xianfang, T. Jiubin, W. Xianfang
Pages2/354-2/360
StatePublished - 2002
EventProceedings of the second International Symposium on Instrumentation Science and Technology - Jinan, China
Duration: 18 Aug 200222 Aug 2002

Publication series

NameProceedings of the Second International Symposium on Instrumentation Science and Technology
Volume2

Conference

ConferenceProceedings of the second International Symposium on Instrumentation Science and Technology
Country/TerritoryChina
CityJinan
Period18/08/0222/08/02

Keywords

  • Axial resolution
  • Confocal microscopy
  • Optical probe

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