@inproceedings{3f5c368b5301448aa21700a39edb13e9,
title = "Optical and mechanical properties of nanocrystalline silicon dioxide films prepared by medium frequency magnetron sputtering",
abstract = "Nanocrystalline silicon dioxide (SiO2) films were prepared on aluminium substrates using medium frequency magnetron sputtering. The surface morphology of SiO2 film on aluminium substrate was observed using atomic force microscopy. The nanohardness and the elastic modulus of the SiO2 film-aluminium system were measured by a nanoindentation technique. Moreover, optical propertie of SiO2 film-aluminium system was investigated. It was found that the composition of silicon dioxide films varies from nearly pure Si, SiO to SiO2, controlled by O2 flow rate. The reflection index of nanocrystalline SiO2 film-aluminium system is accord with the mixture rule. All SiO2 films are transparent and the transmittance increases with increasing O2 concentration.",
keywords = "Magnetron sputtering, nanohardness, reflection index, silicon dioxide film",
author = "Cao, \{Y. Z.\} and Hu, \{Z. J.\} and Yu, \{F. L.\} and T. Sun and S. Dong",
year = "2010",
doi = "10.1117/12.866244",
language = "英语",
isbn = "9780819480859",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
number = "PART 1",
booktitle = "5th International Symposium on Advanced Optical Manufacturing and Testing Technologies",
edition = "PART 1",
note = "5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies ; Conference date: 26-04-2010 Through 29-04-2010",
}