@inproceedings{7275be223bc144c490e25702841b35e5,
title = "Open-loop measurement of data sampling point for SPM",
abstract = "SPM (Scanning Probe Microscope) provides {"}three-dimensional images{"} with nanometer level resolution, and some of them can be used as metrology tools. However, SPM's images are commonly distorted by non-ideal properties of SPM's piezoelectric scanner, which reduces metrological accuracy and data repeatability. In order to eliminate this limit, an {"}open-loop sampling{"} method is presented. In this method, the positional values of sampling points in all three directions on the surface of the sample are measured by the position sensor and recorded in SPM's image file, which is used to replace the image file from a conventional SPM. Because the positions in X and Y directions are measured at the same time of sampling height information in Z direction, the image distortion caused by scanner locating error can be reduced by proper image processing algorithm.",
keywords = "Open-loop measurement, Piezo, SPM, Scanner, Sensor",
author = "Yueyu Wang and Xuezeng Zhao",
year = "2006",
doi = "10.1117/12.655781",
language = "英语",
isbn = "0819461954",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Metrology, Inspection, and Process Control for Microlithography XX",
note = "Metrology, Inspection, and Process Control for Microlithography XX ; Conference date: 20-01-2006 Through 23-01-2006",
}