TY - GEN
T1 - Observation of ultrasonic Al-Si wire wedge bond interface using high resolution transmission electron microscope
AU - Ji, Hongjun
AU - Li, Mingyu
AU - Kweon, Younggak
AU - Chang, Woongseong
AU - Wang, Chunqing
PY - 2007
Y1 - 2007
N2 - Due to small bond size, short bonding time, especially slight interface reaction, bonding details can not be recognized using scanning electron microscope and energy density x-ray spectrum. In order to understand the physical mechanism of ultrasonic wedge bonding, in this paper, bond interface of ultrasonic AlSil wire wedge bonding on Au/Ni/Cu pad was investigated under high resolution transmission electron microscope. Au8Al3 intermetallic compounds were identified by convergent beam electron diffraction, thickness of which was about 200nm and its lattice images were captured. Solid-state diffusion theory can not be used to explain why such thick compound formed within milliseconds at room temperature. Ultrasonic effects attributed to formation of the metallurgical bonds.
AB - Due to small bond size, short bonding time, especially slight interface reaction, bonding details can not be recognized using scanning electron microscope and energy density x-ray spectrum. In order to understand the physical mechanism of ultrasonic wedge bonding, in this paper, bond interface of ultrasonic AlSil wire wedge bonding on Au/Ni/Cu pad was investigated under high resolution transmission electron microscope. Au8Al3 intermetallic compounds were identified by convergent beam electron diffraction, thickness of which was about 200nm and its lattice images were captured. Solid-state diffusion theory can not be used to explain why such thick compound formed within milliseconds at room temperature. Ultrasonic effects attributed to formation of the metallurgical bonds.
UR - https://www.scopus.com/pages/publications/50249188764
U2 - 10.1109/ICEPT.2007.4441433
DO - 10.1109/ICEPT.2007.4441433
M3 - 会议稿件
AN - SCOPUS:50249188764
SN - 1424413923
SN - 9781424413928
T3 - Proceedings of the Electronic Packaging Technology Conference, EPTC
BT - Proceedings of the 2007 8th International Conference on Electronic Packaging Technology, ICEPT
T2 - 2007 8th International Conference on Electronic Packaging Technology, ICEPT
Y2 - 14 August 2007 through 17 August 2007
ER -