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Novel experimental contrivance on competitive cracking in multilayered nano-structures

  • Takayuki Kitamura
  • , Takashi Sumigawa
  • , Kai Huang*
  • , Yabin Yan
  • , Licheng Guo
  • *Corresponding author for this work
  • Kyoto University
  • East China University of Science and Technology

Research output: Contribution to journalArticlepeer-review

Abstract

With the advancement in the miniaturization and integration of micro/nano-devices, the multilayered nano-structures have become ever more important for the constitutive nano-components. Numerous potential cracking sites exist as a result of competition between a wide range of fracture resistances of different layers and a given driving force, and this various cracking behavior has an eminent effect on the reliability of nano-components. However, there are still few experimental trials on competitive cracking at the nanoscale because of so many difficulties in fracture experiments with appropriate precision for extremely small components. This review intends to introduce a series of systematic experimental challenges toward the competitive cracking in multilayered nano-structures, and provides some future directions in terms of fracture nanomechanics.

Original languageEnglish
Pages (from-to)319-327
Number of pages9
JournalTheoretical and Applied Fracture Mechanics
Volume100
DOIs
StatePublished - Apr 2019

Keywords

  • Competitive cracking
  • Experimental methodology
  • Multilayered nano-structures
  • Plasticity
  • Residual stress

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