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New development of atmospheric pressure plasma polishing

  • Bo Wang*
  • , Jufan Zhang
  • , Shen Dong
  • *Corresponding author for this work
  • Harbin Institute of Technology

Research output: Contribution to journalArticlepeer-review

Abstract

Atmospheric pressure plasma polishing (APPP) is a precision machining technology used for manufacturing high quality optical surfaces. The changes of surface modulus and hardness after machining prove the distinct improvement of surface mechanical properties. The demonstrated decrease of surface residual stresses testifies the removal of the former deformation layer. And the surface topographies under atomic force microscope (AFM) and scanning electron microscope (SEM) indicate obvious amelioration of the surface status, showing that the 0.926-nm average surface roughness has been achieved.

Original languageEnglish
Pages (from-to)537-538
Number of pages2
JournalChinese Optics Letters
Volume7
Issue number6
DOIs
StatePublished - Jun 2009

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