Nanofabrication with the thermal AFM metallic tip irradiated by continuous laser

Jianlei Cui; Jianwei Zhang; Theogene Barayavuga; Xuewen Wang; Xiaoqiao He; Lijun Yang; Hui Xie; Xuesong Mei; Wenjun Wang

doi:10.1080/10584587.2017.1331333

Nanofabrication with the thermal AFM metallic tip irradiated by continuous laser

Jianlei Cui^*
, Jianwei Zhang
, Theogene Barayavuga
, Xuewen Wang
, Xiaoqiao He
, Lijun Yang
, Hui Xie
, Xuesong Mei
, Wenjun Wang

^*Corresponding author for this work

School of Mechatronics Engineering

Harbin Institute of Technology
Fudan University
City University of Hong Kong
Xi'an Jiaotong University
City University of Hong Kong Shenzhen Research Institute

Research output: Contribution to journal › Article › peer-review

32 Scopus citations

Abstract

Based on the near-field optical lithography with the metallic AFM tip irradiated by pulse laser, the nanofabrication is proposed with the thermal AFM tip irradiated by continuous laser. The corresponding electric and thermal fields are calculated and simulated to reveal the mechanism. With the thermal AFM tip, the nanostructures can be fabricated with the thermal melting and mechanical extrusion effects based on the thermal expansion effect of the metallic AFM probe.

Original language	English
Pages (from-to)	140-147
Number of pages	8
Journal	Integrated Ferroelectrics
Volume	179
Issue number	1
DOIs	https://doi.org/10.1080/10584587.2017.1331333
State	Published - 24 Mar 2017

Keywords

AFM
Nanofabrication
continuous laser
irradiation

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10.1080/10584587.2017.1331333

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title = "Nanofabrication with the thermal AFM metallic tip irradiated by continuous laser",

abstract = "Based on the near-field optical lithography with the metallic AFM tip irradiated by pulse laser, the nanofabrication is proposed with the thermal AFM tip irradiated by continuous laser. The corresponding electric and thermal fields are calculated and simulated to reveal the mechanism. With the thermal AFM tip, the nanostructures can be fabricated with the thermal melting and mechanical extrusion effects based on the thermal expansion effect of the metallic AFM probe.",

keywords = "AFM, Nanofabrication, continuous laser, irradiation",

author = "Jianlei Cui and Jianwei Zhang and Theogene Barayavuga and Xuewen Wang and Xiaoqiao He and Lijun Yang and Hui Xie and Xuesong Mei and Wenjun Wang",

note = "Publisher Copyright: {\textcopyright} 2017 Taylor \& Francis Group, LLC.",

year = "2017",

month = mar,

day = "24",

doi = "10.1080/10584587.2017.1331333",

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T1 - Nanofabrication with the thermal AFM metallic tip irradiated by continuous laser

AU - Cui, Jianlei

AU - Zhang, Jianwei

AU - Barayavuga, Theogene

AU - Wang, Xuewen

AU - He, Xiaoqiao

AU - Yang, Lijun

AU - Xie, Hui

AU - Mei, Xuesong

AU - Wang, Wenjun

PY - 2017/3/24

Y1 - 2017/3/24

N2 - Based on the near-field optical lithography with the metallic AFM tip irradiated by pulse laser, the nanofabrication is proposed with the thermal AFM tip irradiated by continuous laser. The corresponding electric and thermal fields are calculated and simulated to reveal the mechanism. With the thermal AFM tip, the nanostructures can be fabricated with the thermal melting and mechanical extrusion effects based on the thermal expansion effect of the metallic AFM probe.

AB - Based on the near-field optical lithography with the metallic AFM tip irradiated by pulse laser, the nanofabrication is proposed with the thermal AFM tip irradiated by continuous laser. The corresponding electric and thermal fields are calculated and simulated to reveal the mechanism. With the thermal AFM tip, the nanostructures can be fabricated with the thermal melting and mechanical extrusion effects based on the thermal expansion effect of the metallic AFM probe.

KW - AFM

KW - Nanofabrication

KW - continuous laser

KW - irradiation

UR - https://www.scopus.com/pages/publications/85027696057

U2 - 10.1080/10584587.2017.1331333

DO - 10.1080/10584587.2017.1331333

M3 - 文章

AN - SCOPUS:85027696057

SN - 1058-4587

VL - 179

SP - 140

EP - 147

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 1

ER -

Nanofabrication with the thermal AFM metallic tip irradiated by continuous laser

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Keywords

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