@inproceedings{0203d62a288949d1ac1f75f7fc6ac4a3,
title = "Multiple-grating self-correcting algorithm for processed mark measurement error",
abstract = "When substrate is processed, also any measurement, grating marks available on the substrate, will be influenced: They will be deformed asymmetrically, which gives rise to an measurement-shift error when measuring such a grating mark. To measure on a processed mark, an algorithm is used. This algorithm describes a method to calculate the weight factor of the information from each order. The weight factors of such a algorithm are based on a model which describes the measurement position as a function of the diffraction orders and the mark position. This paper proposes a algorithm for finding these weight factors, and the feasibility of the method is validated through simulation.",
keywords = "Processed mark measurement error, Self correcting algorithm",
author = "Tao Zhang and Jiubin Tan and Jiwen Cui",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014 ; Conference date: 08-08-2014 Through 10-08-2014",
year = "2015",
doi = "10.1117/12.2181178",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Xianfang Wen and Jiubin Tan",
booktitle = "Ninth International Symposium on Precision Engineering Measurements and Instrumentation",
address = "美国",
}