Multi-layer Parameters Optimization of Micro-grinding Process Considering Structured Tools Machining

Micro-grinding has demonstrated significant scientific value and broad application prospects in bioengineering, aerospace, and communication industries. To systematically analyze the influence of topological structure parameters and grinding process parameters on grinding performance and comprehensively multi-layer optimize parameters for multiple grinding quality requirements, this study first investigates the coupling relationships between laser processing parameters and topological structure parameters, as well as between topological structure parameters and grinding process parameters. The synergistic effects of different parameter combinations on grinding performance are revealed. Subsequently, quantitative relationship models among laser parameters, topological structure parameters, grinding process parameters, and grinding performance indicators are established. Then, an improved genetic algorithm (GA) based on elitist optimization is proposed. Comparative validation shows that the improved GA exhibits significant advantages in convergence speed and solution distribution, enabling monitoring of grinding performance indicators based on laser parameters, topological structure parameters, and grinding process parameters. Finally, a micro-comb structure micro device was machined with structured tools.