TY - GEN
T1 - Motion control of nanomanipulation platform based on feedforward compensation inside SEM
AU - Wang, Mingyu
AU - Yang, Zhan
AU - Chen, Tao
AU - Sun, Lining
AU - Fukuda, Toshio
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/4
Y1 - 2019/4
N2 - With the rapid development and wide application of nanotechnology, nanodevice manufacturing with nanotechnology as its core has become one of the key research areas in nanotechnology. Micro-nano operating system based on scanning electron microscope (SEM) is one of the methods to realize nanodevice manufacturing. SmarAct nanomanipulation platform is an important component of micro-nano operating system, which can realize linear motion in three-dimensional space. However, due to mechanical structure and assembly errors, the SmarAct nanomanipulation platform cannot meet the stable requirements during motion. In this paper, the visual feedback and image processing are used to describe the motion trajectory of SmarAct operator. Based on the motion mechanism of SmarAct operator, the error source is analyzed, at the same time, the motion error is modeled according to the motion trajectory. The feedforward compensation is used to realize the stable linear motion of SmarAct operator, and the interpolation algorithm is used to realize the trajectory motion control of the SmarAct nanomanipulation platform.
AB - With the rapid development and wide application of nanotechnology, nanodevice manufacturing with nanotechnology as its core has become one of the key research areas in nanotechnology. Micro-nano operating system based on scanning electron microscope (SEM) is one of the methods to realize nanodevice manufacturing. SmarAct nanomanipulation platform is an important component of micro-nano operating system, which can realize linear motion in three-dimensional space. However, due to mechanical structure and assembly errors, the SmarAct nanomanipulation platform cannot meet the stable requirements during motion. In this paper, the visual feedback and image processing are used to describe the motion trajectory of SmarAct operator. Based on the motion mechanism of SmarAct operator, the error source is analyzed, at the same time, the motion error is modeled according to the motion trajectory. The feedforward compensation is used to realize the stable linear motion of SmarAct operator, and the interpolation algorithm is used to realize the trajectory motion control of the SmarAct nanomanipulation platform.
KW - Scanning Electron Microscope
KW - feedforward control
KW - nanomanipulation
KW - visual feedbacak
UR - https://www.scopus.com/pages/publications/85076708265
U2 - 10.1109/NEMS.2019.8915647
DO - 10.1109/NEMS.2019.8915647
M3 - 会议稿件
AN - SCOPUS:85076708265
T3 - Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019
SP - 370
EP - 374
BT - Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019
Y2 - 11 April 2019 through 14 April 2019
ER -