Monosilane obtained from disproportionation of trimethoxysilane catalyzed with quaternary ammonium hydroxide resin

High purity monosilane was prepared from disproportionation of trimethoxysilane catalyzed with quaternary ammonium hydroxide resin. Crude monosilane was analyzed by pulse discharge helium ionization detector. By-product tetramethoxysilane rectified was analyzed with gas chromatography-mass spectrometry and inductively coupled plasma-mass spectrometry. Experimental results show that the reaction conditions is the temperature range of 30~50°C and the pressure range of 0.2~0.3 MPa. Contents of H ₂, O ₂, Ar, N ₂, and CH ₄ of crude monosilane were 221.12, 1.76, 1.61, 17.97 and 0.15 μg/L, respectively. Content of tetramethoxysilane was 99.9wt%, and total metal impurities of tetramethoxysilane was less than 0.15 μg/L. Furthermore, the tetramethoxysiane can be material of high purity silica sol. The disproportionation reaction of trimethoxysilane catalyzed with quaternary ammonium hydroxide resin was happen at mild reaction conditions, and conversation of trimethoxysilane was 96wt%, and yield of monosilane was 95wt%. Catalyst is easy to buy, and fixed bed reactor is easy to control the reaction, and easy to continuous feeding, and then the technology has industrial production value.