TY - GEN
T1 - Molecular dynamics study of nano-tribological properties of silicon nitride films
AU - Li, Longqiu
AU - Wang, Shufeng
AU - Ovcharenko, Andrey
AU - Wang, Wuyi
N1 - Publisher Copyright:
Copyright © 2014 by ASME.
PY - 2014
Y1 - 2014
N2 - Silicon nitride films were attracting extensive research interest in the past few decades as hard disk protective coating, especially the beta-silicon nitride (β-Si3N4) films and amorphous silicon nitride (SiNx) films, which have high hardness, chemical durability and low friction coefficient properties against wear, corrosion and reducing the friction resistance, respectively. Considerable efforts have been made in studying silicon nitride. However, it's difficult to determine its nano-tribological properties experimentally since the results were affected by a lot of contact and environment conditions. The molecular dynamics (MD) simulation method is employed in this work. A rigid diamond sphere modeled as a spherical tip are sliding over a layered silicon nitride film substrate, respectively, to investigate the tribological properties of silicon nitride films. The effect of the relative sliding velocity and sliding direction, the normal force and the thickness of crystalline silicon nitride films on the friction coefficient of silicon nitride films were investigated.
AB - Silicon nitride films were attracting extensive research interest in the past few decades as hard disk protective coating, especially the beta-silicon nitride (β-Si3N4) films and amorphous silicon nitride (SiNx) films, which have high hardness, chemical durability and low friction coefficient properties against wear, corrosion and reducing the friction resistance, respectively. Considerable efforts have been made in studying silicon nitride. However, it's difficult to determine its nano-tribological properties experimentally since the results were affected by a lot of contact and environment conditions. The molecular dynamics (MD) simulation method is employed in this work. A rigid diamond sphere modeled as a spherical tip are sliding over a layered silicon nitride film substrate, respectively, to investigate the tribological properties of silicon nitride films. The effect of the relative sliding velocity and sliding direction, the normal force and the thickness of crystalline silicon nitride films on the friction coefficient of silicon nitride films were investigated.
UR - https://www.scopus.com/pages/publications/84961366498
U2 - 10.1115/DETC2014-34857
DO - 10.1115/DETC2014-34857
M3 - 会议稿件
AN - SCOPUS:84961366498
T3 - Proceedings of the ASME Design Engineering Technical Conference
BT - 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- andNanosystems
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2014
Y2 - 17 August 2014 through 20 August 2014
ER -