Molecular dynamics simulation study on ablation of silicon by water-jet-guided laser

Weiguo Zhou; Keyu Gong; Jie Wan; Lulu Quan; Yuchuan Chu; Yong Cao

doi:10.1177/0954408916662088

Molecular dynamics simulation study on ablation of silicon by water-jet-guided laser

Weiguo Zhou
, Keyu Gong
, Jie Wan
, Lulu Quan
, Yuchuan Chu
, Yong Cao^*

^*Corresponding author for this work

School of Energy Science and Engineering

Harbin Institute of Technology Shenzhen

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

Stillinger–Weber potential and Z-layer energy model were adopted in molecular dynamics simulation to study the ablation of silicon by water-jet-guided femtosecond laser, and comparison was made by ablating silicon with or without water-jet cooling in our simulations. Simulation results indicated that with water-jet cooling, the thermal-affected zone could be reduced in area, and the peak of density could disappear more quickly. It was therefore concluded that water-jet-guided laser could be used to considerably improve the ablation quality of silicon.

Original language	English
Pages (from-to)	1217-1225
Number of pages	9
Journal	Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering
Volume	231
Issue number	6
DOIs	https://doi.org/10.1177/0954408916662088
State	Published - 1 Dec 2017

Keywords

Molecular dynamics simulation
resolidification
thermal wave
water-jet-guided laser

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10.1177/0954408916662088

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title = "Molecular dynamics simulation study on ablation of silicon by water-jet-guided laser",

abstract = "Stillinger–Weber potential and Z-layer energy model were adopted in molecular dynamics simulation to study the ablation of silicon by water-jet-guided femtosecond laser, and comparison was made by ablating silicon with or without water-jet cooling in our simulations. Simulation results indicated that with water-jet cooling, the thermal-affected zone could be reduced in area, and the peak of density could disappear more quickly. It was therefore concluded that water-jet-guided laser could be used to considerably improve the ablation quality of silicon.",

keywords = "Molecular dynamics simulation, resolidification, thermal wave, water-jet-guided laser",

author = "Weiguo Zhou and Keyu Gong and Jie Wan and Lulu Quan and Yuchuan Chu and Yong Cao",

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doi = "10.1177/0954408916662088",

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T1 - Molecular dynamics simulation study on ablation of silicon by water-jet-guided laser

AU - Zhou, Weiguo

AU - Gong, Keyu

AU - Wan, Jie

AU - Quan, Lulu

AU - Chu, Yuchuan

AU - Cao, Yong

PY - 2017/12/1

Y1 - 2017/12/1

N2 - Stillinger–Weber potential and Z-layer energy model were adopted in molecular dynamics simulation to study the ablation of silicon by water-jet-guided femtosecond laser, and comparison was made by ablating silicon with or without water-jet cooling in our simulations. Simulation results indicated that with water-jet cooling, the thermal-affected zone could be reduced in area, and the peak of density could disappear more quickly. It was therefore concluded that water-jet-guided laser could be used to considerably improve the ablation quality of silicon.

AB - Stillinger–Weber potential and Z-layer energy model were adopted in molecular dynamics simulation to study the ablation of silicon by water-jet-guided femtosecond laser, and comparison was made by ablating silicon with or without water-jet cooling in our simulations. Simulation results indicated that with water-jet cooling, the thermal-affected zone could be reduced in area, and the peak of density could disappear more quickly. It was therefore concluded that water-jet-guided laser could be used to considerably improve the ablation quality of silicon.

KW - Molecular dynamics simulation

KW - resolidification

KW - thermal wave

KW - water-jet-guided laser

UR - https://www.scopus.com/pages/publications/85032820735

U2 - 10.1177/0954408916662088

DO - 10.1177/0954408916662088

M3 - 文章

AN - SCOPUS:85032820735

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JO - Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering

JF - Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering

IS - 6

ER -

Molecular dynamics simulation study on ablation of silicon by water-jet-guided laser

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Keywords

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