Modelling and simulation of MEMS components for RF applications

Jia Hui Fu; Qun Wu; Fan Yi Meng; Yue Mei Qin; Cai Tian Yang

Modelling and simulation of MEMS components for RF applications

Jia Hui Fu^*
, Qun Wu
, Fan Yi Meng
, Yue Mei Qin
, Cai Tian Yang

^*Corresponding author for this work

School of Astronautics, Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

Based on the unique characteristics of RF MEMS element construction, this paper proposed the design approaches to predict MEMS behavior. We presents Electromagnetism methods, Mechanical, Thermal methods and Electrothermal concepts in modeling the RF MEMS model and application of simulation design. This paper provides a new concept for the accurately design of the RF MEMS elements with nature description.

Original language	English
Pages (from-to)	156-159
Number of pages	4
Journal	Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology
Volume	39
Issue number	SUPPL. 1
State	Published - Jun 2007
Externally published	Yes

Keywords

MEMS
Modeling
Radio frequency
Simulation

Cite this

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title = "Modelling and simulation of MEMS components for RF applications",

abstract = "Based on the unique characteristics of RF MEMS element construction, this paper proposed the design approaches to predict MEMS behavior. We presents Electromagnetism methods, Mechanical, Thermal methods and Electrothermal concepts in modeling the RF MEMS model and application of simulation design. This paper provides a new concept for the accurately design of the RF MEMS elements with nature description.",

keywords = "MEMS, Modeling, Radio frequency, Simulation",

author = "Fu, \{Jia Hui\} and Qun Wu and Meng, \{Fan Yi\} and Qin, \{Yue Mei\} and Yang, \{Cai Tian\}",

year = "2007",

month = jun,

language = "英语",

volume = "39",

pages = "156--159",

journal = "Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology",

issn = "0367-6234",

publisher = "Harbin Institute of Technology",

number = "SUPPL. 1",

}

TY - JOUR

T1 - Modelling and simulation of MEMS components for RF applications

AU - Fu, Jia Hui

AU - Wu, Qun

AU - Meng, Fan Yi

AU - Qin, Yue Mei

AU - Yang, Cai Tian

PY - 2007/6

Y1 - 2007/6

N2 - Based on the unique characteristics of RF MEMS element construction, this paper proposed the design approaches to predict MEMS behavior. We presents Electromagnetism methods, Mechanical, Thermal methods and Electrothermal concepts in modeling the RF MEMS model and application of simulation design. This paper provides a new concept for the accurately design of the RF MEMS elements with nature description.

AB - Based on the unique characteristics of RF MEMS element construction, this paper proposed the design approaches to predict MEMS behavior. We presents Electromagnetism methods, Mechanical, Thermal methods and Electrothermal concepts in modeling the RF MEMS model and application of simulation design. This paper provides a new concept for the accurately design of the RF MEMS elements with nature description.

KW - MEMS

KW - Modeling

KW - Radio frequency

KW - Simulation

UR - https://www.scopus.com/pages/publications/36549065745

M3 - 文章

AN - SCOPUS:36549065745

SN - 0367-6234

VL - 39

SP - 156

EP - 159

JO - Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology

JF - Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology

IS - SUPPL. 1

ER -

Modelling and simulation of MEMS components for RF applications

Abstract

Keywords

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