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Modeling of a viscometric MEMS affinity glucose sensor

  • Junyi Shang
  • , Hao Sun
  • , Qiao Lin*
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Coupled structural vibration and fluid flow is a challenging problem of great practical relevance to MEMS sensors and actuators. We address this problem with a MEMS viscometric glucose sensor as a demonstrative example using theory of squeeze-film damping and vibrations of pre-stressed diaphragms. The theory, combined with experimental verification, is used to understand the interactions between structural vibrations and highly confined flow in the device. A first-principle-based model resulting from the theory can be evaluated from the device's geometric and material properties, and quantitatively determine the device response to vibrational excitations at varying glucose concentrations. The calculated device response correctly predicts trends observed in experiments.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2091-2094
Number of pages4
ISBN (Electronic)9781538627310
DOIs
StatePublished - 26 Jul 2017
Externally publishedYes
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Country/TerritoryTaiwan, Province of China
CityKaohsiung
Period18/06/1722/06/17

Keywords

  • Affinity sensing
  • confined fluid flow
  • fluid-structure interactions
  • glucose sensing
  • lubrication theory

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