Modeling for integrated micromanipulator

Wei Bin Rong; Dong Sheng Qu; Li Ning Sun; Chao Fei Lou; He Gao Cai

Modeling for integrated micromanipulator

Wei Bin Rong^*
, Dong Sheng Qu
, Li Ning Sun
, Chao Fei Lou
, He Gao Cai

^*Corresponding author for this work

School of Mechatronics Engineering

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

According to the principle of a piezoelectric scanner, a three degree-of-freedom (D. 0. F) micromanipulator driven by piezoelectric tubes was developed to realize the integration of mechanism and actuator. Through the static analysis of the deflection of piezoelectric tube into four quadrants, a formula has been established the relationship between micro-displacement and driving voltage and accordingly, the angular error is analyzed. Experiments show that the micro-displacement calculated using the formula is in good agreement with the measurements. The relative error is less than 5%. Some performances of the micromanipulator show that it can be applied to some micromanipulations.

Original language	English
Pages (from-to)	371-375
Number of pages	5
Journal	Journal of Harbin Institute of Technology (New Series)
Volume	10
Issue number	4
State	Published - Dec 2003

Keywords

Micromanipulator
Modeling
Piezoelectric scanner
Piezoelectric tube

Cite this

@article{31eaf95645154fc89ce3d65793dbe595,

title = "Modeling for integrated micromanipulator",

abstract = "According to the principle of a piezoelectric scanner, a three degree-of-freedom (D. 0. F) micromanipulator driven by piezoelectric tubes was developed to realize the integration of mechanism and actuator. Through the static analysis of the deflection of piezoelectric tube into four quadrants, a formula has been established the relationship between micro-displacement and driving voltage and accordingly, the angular error is analyzed. Experiments show that the micro-displacement calculated using the formula is in good agreement with the measurements. The relative error is less than 5\%. Some performances of the micromanipulator show that it can be applied to some micromanipulations.",

keywords = "Micromanipulator, Modeling, Piezoelectric scanner, Piezoelectric tube",

author = "Rong, \{Wei Bin\} and Qu, \{Dong Sheng\} and Sun, \{Li Ning\} and Lou, \{Chao Fei\} and Cai, \{He Gao\}",

year = "2003",

month = dec,

language = "英语",

volume = "10",

pages = "371--375",

journal = "Journal of Harbin Institute of Technology (New Series)",

issn = "1005-9113",

publisher = "Harbin Institute of Technology",

number = "4",

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TY - JOUR

T1 - Modeling for integrated micromanipulator

AU - Rong, Wei Bin

AU - Qu, Dong Sheng

AU - Sun, Li Ning

AU - Lou, Chao Fei

AU - Cai, He Gao

PY - 2003/12

Y1 - 2003/12

N2 - According to the principle of a piezoelectric scanner, a three degree-of-freedom (D. 0. F) micromanipulator driven by piezoelectric tubes was developed to realize the integration of mechanism and actuator. Through the static analysis of the deflection of piezoelectric tube into four quadrants, a formula has been established the relationship between micro-displacement and driving voltage and accordingly, the angular error is analyzed. Experiments show that the micro-displacement calculated using the formula is in good agreement with the measurements. The relative error is less than 5%. Some performances of the micromanipulator show that it can be applied to some micromanipulations.

AB - According to the principle of a piezoelectric scanner, a three degree-of-freedom (D. 0. F) micromanipulator driven by piezoelectric tubes was developed to realize the integration of mechanism and actuator. Through the static analysis of the deflection of piezoelectric tube into four quadrants, a formula has been established the relationship between micro-displacement and driving voltage and accordingly, the angular error is analyzed. Experiments show that the micro-displacement calculated using the formula is in good agreement with the measurements. The relative error is less than 5%. Some performances of the micromanipulator show that it can be applied to some micromanipulations.

KW - Micromanipulator

KW - Modeling

KW - Piezoelectric scanner

KW - Piezoelectric tube

UR - https://www.scopus.com/pages/publications/1942476135

M3 - 文章

AN - SCOPUS:1942476135

SN - 1005-9113

VL - 10

SP - 371

EP - 375

JO - Journal of Harbin Institute of Technology (New Series)

JF - Journal of Harbin Institute of Technology (New Series)

IS - 4

ER -

Modeling for integrated micromanipulator

Abstract

Keywords

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