TY - GEN
T1 - Modeling and control of macro-micro dual-drive high acceleration and high precision positioning stage using for IC packaging
AU - Liu, Yanjie
AU - Li, Teng
AU - Sun, Lining
PY - 2008
Y1 - 2008
N2 - Macro-micro dual-drive positioning stage has particularly good potential application in high acceleration and high precision positioning stage using for IC packaging. In this paper, the positioning stage which is composed by VCM (voice coil motor) as macro driver and PZT as micro driver is used. Coupling characters of the stage are discussed by analyzing dynamic model firstly, then models of macro drive positioning stage and micro drive positioning stage are built separately which both contain mechanism and driver part. Finally, a control structure, micro drive positioning stage dynamic compensate the positioning error produced by macro drive positioning stage, is proposed, in this control structure, LQG control method is used to control macro drive positioning stage, and PID control method is used to control the micro drive positioning stage. Detailed designs are conducted for the proposed approach, and the simulation results demonstrate the good performance of the proposed controller.
AB - Macro-micro dual-drive positioning stage has particularly good potential application in high acceleration and high precision positioning stage using for IC packaging. In this paper, the positioning stage which is composed by VCM (voice coil motor) as macro driver and PZT as micro driver is used. Coupling characters of the stage are discussed by analyzing dynamic model firstly, then models of macro drive positioning stage and micro drive positioning stage are built separately which both contain mechanism and driver part. Finally, a control structure, micro drive positioning stage dynamic compensate the positioning error produced by macro drive positioning stage, is proposed, in this control structure, LQG control method is used to control macro drive positioning stage, and PID control method is used to control the micro drive positioning stage. Detailed designs are conducted for the proposed approach, and the simulation results demonstrate the good performance of the proposed controller.
KW - LQG
KW - Macro-micro dual-drive
KW - Modeling
KW - Motion couple
KW - Positioning stage
UR - https://www.scopus.com/pages/publications/56749093323
U2 - 10.1007/978-3-540-88518-4_30
DO - 10.1007/978-3-540-88518-4_30
M3 - 会议稿件
AN - SCOPUS:56749093323
SN - 3540885161
SN - 9783540885160
T3 - Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
SP - 269
EP - 278
BT - Intelligent Robotics and Applications - First International Conference, ICIRA 2008, Proceedings
T2 - 1st International Conference on Intelligent Robotics and Applications, ICIRA 2008
Y2 - 15 October 2008 through 17 October 2008
ER -