Modeling and control of a novel piezoelectric actuated precision fast positioning system

The need for a precision fast positioning technique is drawing significant attention from optical engineering, semiconductor industry, biotechnology, and nanotechnology, etc. This paper presents a novel piezoelectric (PZT) actuated precision fast positioning system (PFPS), which consists of a control module, PZT driving module, a precision fast positioning mechanism (PFPM), and a micro-displacement measure module. It controls the tilt and piston movements quickly and precisely. The driving, mechanism and measure integrative model of the PFPS has been built. The methods of digital proportional integral differential (PID) feedback control and self-tuning fuzzy PID control are studied. Simulation results prove that the proposed self-tuning fuzzy PID controller has good dynamic and static performances. A dynamic performance test system has been established. The experimental results confirm the validity of the design and the theoretical analysis of the PFPS.