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MIV Fault Modeling Method Based on Finite Element Analysis

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Compared with integrated circuits based on through-silicon vias (TSVs), Monolithic three-dimensional integrated circuits (M3D ICs) have higher integration and relatively superior electrical performance. However, monolithic inter-tier vias (MIVs) inside M3D ICs are prone to failure. Accurate MIV fault models can provide the basis for subsequent fault detection work. In this paper, a MIV fault modeling method based on finite element analysis (FEA) is proposed, and MIV fault models are established by FEA softwares. The proposed method has high precision and is beneficial to further improve the detectable fault range of MIVs.

Original languageEnglish
Title of host publication2021 IEEE International Conference on Integrated Circuits, Technologies and Applications, ICTA 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages149-152
Number of pages4
ISBN (Electronic)9781665417471
DOIs
StatePublished - 2021
Externally publishedYes
Event2021 IEEE International Conference on Integrated Circuits, Technologies and Applications, ICTA 2021 - Zhuhai, China
Duration: 24 Nov 202126 Nov 2021

Publication series

Name2021 IEEE International Conference on Integrated Circuits, Technologies and Applications, ICTA 2021

Conference

Conference2021 IEEE International Conference on Integrated Circuits, Technologies and Applications, ICTA 2021
Country/TerritoryChina
CityZhuhai
Period24/11/2126/11/21

Keywords

  • M3D ICs
  • MIV fault model
  • finite element analysis
  • monolithic inter-tier vias

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