TY - GEN
T1 - Microwave technology used for plasma diagnostic in complicated situations
AU - Yao, Jingfeng
AU - Yu, Zhi
AU - Yuan, Chengxun
AU - Zhou, Zhongxiang
AU - Wang, Hailu
AU - Li, Zebin
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/7/2
Y1 - 2018/7/2
N2 - In this paper, the microwave technology has been applied to measure the plasma parameters in large-volume AC glow discharge with coaxial gridded hollow electrodes. By measuring the phase shift of microwave through the plasma, the characteristics of the plasma density changing with the input power in hollow ac discharge plasma has been confirmed. The phase shift of the microwave is determined by vector network analyzer (PNA-N5234A) with antennas, and the selected microwave frequency is 30GHz. Then, the experimental results are compared with the theoretical results and are in good agreement. Additionally, using the improved probe technology, the plasma parameters also are obtained by probe diagnostics. And the probe results are compared to the microwave technology, which indicates that in the AC glow discharge the microwave diagnostic is more stable and accurate.
AB - In this paper, the microwave technology has been applied to measure the plasma parameters in large-volume AC glow discharge with coaxial gridded hollow electrodes. By measuring the phase shift of microwave through the plasma, the characteristics of the plasma density changing with the input power in hollow ac discharge plasma has been confirmed. The phase shift of the microwave is determined by vector network analyzer (PNA-N5234A) with antennas, and the selected microwave frequency is 30GHz. Then, the experimental results are compared with the theoretical results and are in good agreement. Additionally, using the improved probe technology, the plasma parameters also are obtained by probe diagnostics. And the probe results are compared to the microwave technology, which indicates that in the AC glow discharge the microwave diagnostic is more stable and accurate.
KW - hollow discharge
KW - microwave diagnostic
KW - plasma diagnostic
UR - https://www.scopus.com/pages/publications/85062854483
U2 - 10.1109/ISAPE.2018.8634218
DO - 10.1109/ISAPE.2018.8634218
M3 - 会议稿件
AN - SCOPUS:85062854483
T3 - 2018 12th International Symposium on Antennas, Propagation and EM Theory, ISAPE 2018 - Proceedings
BT - 2018 12th International Symposium on Antennas, Propagation and EM Theory, ISAPE 2018 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 12th International Symposium on Antennas, Propagation and EM Theory, ISAPE 2018
Y2 - 3 December 2018 through 6 December 2018
ER -