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Microwave cavity resonance spectrum used for plasma diagnostics in AC glow discharge plasma

  • Bohan Ren
  • , Jingfeng Yao
  • , Chengxun Yuan*
  • *Corresponding author for this work
  • School of Physics, Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, microwave diagnostic was applied to AC glow discharge plasma. The electron density and the collision frequency changing with the input power in the fluorescent lamp have been measured by microwave cavity resonance spectrum (MCRS) which is proven to be useful for low density plasma diagnostic. By using the global model, electron density and collision frequency can be calculated by the variation of spectrum map. The resonant mode is altered by changing the position of the microwave antenna. The spectrum is measured by spectrum analyzer (DSA-815), and the frequency ranges from 9 kHz to 1.5 GHz. Finally, the experimental results are compared with the theoretical results.

Original languageEnglish
Title of host publication13th International Symposium on Antennas, Propagation and EM Theory, ISAPE 2021 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665418126
DOIs
StatePublished - 2021
Externally publishedYes
Event13th International Symposium on Antennas, Propagation and EM Theory, ISAPE 2021 - Zhuhai, China
Duration: 1 Dec 20214 Dec 2021

Publication series

Name13th International Symposium on Antennas, Propagation and EM Theory, ISAPE 2021 - Proceedings

Conference

Conference13th International Symposium on Antennas, Propagation and EM Theory, ISAPE 2021
Country/TerritoryChina
CityZhuhai
Period1/12/214/12/21

Keywords

  • ac glow discharge
  • microwave resonance cavity spectroscopy
  • plasma diagnostic

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