@inproceedings{b24d6bac5d844117a10b19d3210a0cad,
title = "Microwave cavity resonance spectrum used for plasma diagnostics in AC glow discharge plasma",
abstract = "In this paper, microwave diagnostic was applied to AC glow discharge plasma. The electron density and the collision frequency changing with the input power in the fluorescent lamp have been measured by microwave cavity resonance spectrum (MCRS) which is proven to be useful for low density plasma diagnostic. By using the global model, electron density and collision frequency can be calculated by the variation of spectrum map. The resonant mode is altered by changing the position of the microwave antenna. The spectrum is measured by spectrum analyzer (DSA-815), and the frequency ranges from 9 kHz to 1.5 GHz. Finally, the experimental results are compared with the theoretical results.",
keywords = "ac glow discharge, microwave resonance cavity spectroscopy, plasma diagnostic",
author = "Bohan Ren and Jingfeng Yao and Chengxun Yuan",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 13th International Symposium on Antennas, Propagation and EM Theory, ISAPE 2021 ; Conference date: 01-12-2021 Through 04-12-2021",
year = "2021",
doi = "10.1109/ISAPE54070.2021.9753612",
language = "英语",
series = "13th International Symposium on Antennas, Propagation and EM Theory, ISAPE 2021 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "13th International Symposium on Antennas, Propagation and EM Theory, ISAPE 2021 - Proceedings",
address = "美国",
}