Abstract
Steel M50 was modified by plasma-based ion implantation (PBII) at different temperatures. The results of scanning electron microscope (SEM) indicate that PBII at elevated temperature can reduce both grain size of substrate and precipitates in the implanted layer and remove the network microstructure of carbides in the substrate. Glancing angle X-ray diffraction (GXRD) analysis indicates that the elevated temperature is in favor of the formation of nitrides. The diffraction peaks of nitrides are obvious when the temperature is higher than 300 °C with implantation voltage of 25 kV.
| Original language | English |
|---|---|
| Pages (from-to) | 374-376 |
| Number of pages | 3 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 242 |
| Issue number | 1-2 |
| DOIs | |
| State | Published - Jan 2006 |
| Externally published | Yes |
Keywords
- Elevated temperature
- Microstructure
- PBII
- Steel
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