Microstructure and high-temperature tribological properties of Ti/Si co-doped diamond-like carbon films fabricated by twin-targets reactive HiPIMS

Yuanshu Zou; Xiaofeng Wang; Langping Wang

doi:10.1016/j.diamond.2023.110573

Microstructure and high-temperature tribological properties of Ti/Si co-doped diamond-like carbon films fabricated by twin-targets reactive HiPIMS

Yuanshu Zou
, Xiaofeng Wang
, Langping Wang^*

^*Corresponding author for this work

School of Materials Science and Engineering

Harbin Institute of Technology
Contemporary Amperex Technology Co., Limited

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

In order to enhance high-temperature tribological properties of the diamond-like carbon (DLC) films, Ti/Si co-doped DLC films were synthesized by twin-targets reactive high power impulse magnetron sputtering and effects of doped elements on mechanical performances were investigated. The results showed that a mid-doped DLC film with a Ti content of 13.8 at.% and a Si content of 12.6 at.% obtained the best high temperature tribological performance and its wear resistance was significantly less affected. The friction coefficient of the Ti/Si co-doped DLC film at 450 °C dropped to as low as 0.08. In addition, compared with the mono Ti-doped DLC film, its wear rate at 450 °C decreased from 5.24 × 10⁻⁴ to 1.40 × 10⁻⁵ mm³·N⁻¹·m⁻¹. Raman spectra revealed that Si could hinder the sp³-C to sp²-C transition at elevated temperatures, which impeded adhesive wear in the high temperature tribological process.

Original language	English
Article number	110573
Journal	Diamond and Related Materials
Volume	141
DOIs	https://doi.org/10.1016/j.diamond.2023.110573
State	Published - Jan 2024

Keywords

Diamond like carbon
High-temperature tribology
Ti/Si co-doping
Wear rate

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@article{c39960ea217e48be906cebdc305e99fd,

title = "Microstructure and high-temperature tribological properties of Ti/Si co-doped diamond-like carbon films fabricated by twin-targets reactive HiPIMS",

abstract = "In order to enhance high-temperature tribological properties of the diamond-like carbon (DLC) films, Ti/Si co-doped DLC films were synthesized by twin-targets reactive high power impulse magnetron sputtering and effects of doped elements on mechanical performances were investigated. The results showed that a mid-doped DLC film with a Ti content of 13.8 at.\% and a Si content of 12.6 at.\% obtained the best high temperature tribological performance and its wear resistance was significantly less affected. The friction coefficient of the Ti/Si co-doped DLC film at 450 °C dropped to as low as 0.08. In addition, compared with the mono Ti-doped DLC film, its wear rate at 450 °C decreased from 5.24 × 10−4 to 1.40 × 10−5 mm3·N−1·m−1. Raman spectra revealed that Si could hinder the sp3-C to sp2-C transition at elevated temperatures, which impeded adhesive wear in the high temperature tribological process.",

keywords = "Diamond like carbon, High-temperature tribology, Ti/Si co-doping, Wear rate",

author = "Yuanshu Zou and Xiaofeng Wang and Langping Wang",

note = "Publisher Copyright: {\textcopyright} 2023 Elsevier B.V.",

year = "2024",

month = jan,

doi = "10.1016/j.diamond.2023.110573",

language = "英语",

volume = "141",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Microstructure and high-temperature tribological properties of Ti/Si co-doped diamond-like carbon films fabricated by twin-targets reactive HiPIMS

AU - Zou, Yuanshu

AU - Wang, Xiaofeng

AU - Wang, Langping

PY - 2024/1

Y1 - 2024/1

N2 - In order to enhance high-temperature tribological properties of the diamond-like carbon (DLC) films, Ti/Si co-doped DLC films were synthesized by twin-targets reactive high power impulse magnetron sputtering and effects of doped elements on mechanical performances were investigated. The results showed that a mid-doped DLC film with a Ti content of 13.8 at.% and a Si content of 12.6 at.% obtained the best high temperature tribological performance and its wear resistance was significantly less affected. The friction coefficient of the Ti/Si co-doped DLC film at 450 °C dropped to as low as 0.08. In addition, compared with the mono Ti-doped DLC film, its wear rate at 450 °C decreased from 5.24 × 10−4 to 1.40 × 10−5 mm3·N−1·m−1. Raman spectra revealed that Si could hinder the sp3-C to sp2-C transition at elevated temperatures, which impeded adhesive wear in the high temperature tribological process.

AB - In order to enhance high-temperature tribological properties of the diamond-like carbon (DLC) films, Ti/Si co-doped DLC films were synthesized by twin-targets reactive high power impulse magnetron sputtering and effects of doped elements on mechanical performances were investigated. The results showed that a mid-doped DLC film with a Ti content of 13.8 at.% and a Si content of 12.6 at.% obtained the best high temperature tribological performance and its wear resistance was significantly less affected. The friction coefficient of the Ti/Si co-doped DLC film at 450 °C dropped to as low as 0.08. In addition, compared with the mono Ti-doped DLC film, its wear rate at 450 °C decreased from 5.24 × 10−4 to 1.40 × 10−5 mm3·N−1·m−1. Raman spectra revealed that Si could hinder the sp3-C to sp2-C transition at elevated temperatures, which impeded adhesive wear in the high temperature tribological process.

KW - Diamond like carbon

KW - High-temperature tribology

KW - Ti/Si co-doping

KW - Wear rate

UR - https://www.scopus.com/pages/publications/85176503420

U2 - 10.1016/j.diamond.2023.110573

DO - 10.1016/j.diamond.2023.110573

M3 - 文章

AN - SCOPUS:85176503420

SN - 0925-9635

VL - 141

JO - Diamond and Related Materials

JF - Diamond and Related Materials

M1 - 110573

ER -

Microstructure and high-temperature tribological properties of Ti/Si co-doped diamond-like carbon films fabricated by twin-targets reactive HiPIMS

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Keywords

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