Abstract
Copper wires are increasingly used in place of gold wires for making bonded interconnections in microelectronics. In this paper, a microstructural study is reported of cross-sectioned free air balls (FABs) made with 23 μm diameter copper bonding wire. It was found that the FAB is comprised of a few columnar grains and a large number of fine subgrains formed within the columnar grains around the periphery of the FAB. It was determined that conduction through the wire was the dominant heat loss mechanism during cooling, and the solidification process started from the wire-ball interface and proceeded across the diameter then outward towards the ball periphery. The microstructure of the Cu ball bond after thermosonic bonding was investigated. The result showed that the subgrain orientations were changed in the bonding process. It is evident that metal flow along the bonding interface was from the central area to the bond periphery during thermosonic bonding. Crown
| Original language | English |
|---|---|
| Pages (from-to) | 1815-1819 |
| Number of pages | 5 |
| Journal | Microelectronic Engineering |
| Volume | 85 |
| Issue number | 8 |
| DOIs | |
| State | Published - Aug 2008 |
Keywords
- Columnar
- Copper wire bonding
- Free air ball
- Metal flow
- Subgrain
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