Microstructural characterization of N, Ti mixed coatings deposited by plasma based ion implantation and magnetron sputtering deposition

Xinxin Ma; Renchao Che; Mingren Sun; Yue Sun; Lifang Xia; Xiaodong Li

doi:10.1023/A:1006790006750

Microstructural characterization of N, Ti mixed coatings deposited by plasma based ion implantation and magnetron sputtering deposition

Xinxin Ma^*
, Renchao Che
, Mingren Sun
, Yue Sun
, Lifang Xia
, Xiaodong Li

^*Corresponding author for this work

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Single and multi-cycle Ni, Ti mixed coatings were deposited by magnetron sputtering and plasma source ion implantation (PSII) methods. X-ray photoelectron spectroscopic and transmission electron microscopic characterization of the coatings demonstrated a uniform composition. The coatings consisted of fine polycrystalline TiN particles dispersed on α-Ti matrix. The size of the TiN particles was less than 5 nm. During the PSII process, the α-Fe phase near the substrate side was bombarded into fine polycrystalline α-Fe particles by nitrogen ions.

Original language	English
Pages (from-to)	635-638
Number of pages	4
Journal	Journal of Materials Science Letters
Volume	19
Issue number	8
DOIs	https://doi.org/10.1023/A:1006790006750
State	Published - 2000
Externally published	Yes

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@article{f791c46d6cc94b60b48160598f25c649,

title = "Microstructural characterization of N, Ti mixed coatings deposited by plasma based ion implantation and magnetron sputtering deposition",

abstract = "Single and multi-cycle Ni, Ti mixed coatings were deposited by magnetron sputtering and plasma source ion implantation (PSII) methods. X-ray photoelectron spectroscopic and transmission electron microscopic characterization of the coatings demonstrated a uniform composition. The coatings consisted of fine polycrystalline TiN particles dispersed on α-Ti matrix. The size of the TiN particles was less than 5 nm. During the PSII process, the α-Fe phase near the substrate side was bombarded into fine polycrystalline α-Fe particles by nitrogen ions.",

author = "Xinxin Ma and Renchao Che and Mingren Sun and Yue Sun and Lifang Xia and Xiaodong Li",

year = "2000",

doi = "10.1023/A:1006790006750",

language = "英语",

volume = "19",

pages = "635--638",

journal = "Journal of Materials Science Letters",

issn = "0261-8028",

publisher = "Chapman \& Hall",

number = "8",

}

TY - JOUR

T1 - Microstructural characterization of N, Ti mixed coatings deposited by plasma based ion implantation and magnetron sputtering deposition

AU - Ma, Xinxin

AU - Che, Renchao

AU - Sun, Mingren

AU - Sun, Yue

AU - Xia, Lifang

AU - Li, Xiaodong

PY - 2000

Y1 - 2000

N2 - Single and multi-cycle Ni, Ti mixed coatings were deposited by magnetron sputtering and plasma source ion implantation (PSII) methods. X-ray photoelectron spectroscopic and transmission electron microscopic characterization of the coatings demonstrated a uniform composition. The coatings consisted of fine polycrystalline TiN particles dispersed on α-Ti matrix. The size of the TiN particles was less than 5 nm. During the PSII process, the α-Fe phase near the substrate side was bombarded into fine polycrystalline α-Fe particles by nitrogen ions.

AB - Single and multi-cycle Ni, Ti mixed coatings were deposited by magnetron sputtering and plasma source ion implantation (PSII) methods. X-ray photoelectron spectroscopic and transmission electron microscopic characterization of the coatings demonstrated a uniform composition. The coatings consisted of fine polycrystalline TiN particles dispersed on α-Ti matrix. The size of the TiN particles was less than 5 nm. During the PSII process, the α-Fe phase near the substrate side was bombarded into fine polycrystalline α-Fe particles by nitrogen ions.

UR - https://www.scopus.com/pages/publications/0033902107

U2 - 10.1023/A:1006790006750

DO - 10.1023/A:1006790006750

M3 - 文章

AN - SCOPUS:0033902107

SN - 0261-8028

VL - 19

SP - 635

EP - 638

JO - Journal of Materials Science Letters

JF - Journal of Materials Science Letters

IS - 8

ER -

Microstructural characterization of N, Ti mixed coatings deposited by plasma based ion implantation and magnetron sputtering deposition

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