Micromachining technique based on the orbital motion of the diamond tip

Y. D. Yan; B. Xue; X. S. Zhao

doi:10.1016/B978-0-85709-485-8.00003-6

Micromachining technique based on the orbital motion of the diamond tip

Y. D. Yan^*
, B. Xue
, X. S. Zhao

^*Corresponding author for this work

School of Mechatronics Engineering

Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Abstract

This chapter discusses a micromechanical machining technique based on the orbital motion of the diamond tip. The chapter first describes its principle and establishment of the setup based on this idea. The chapter then studies the micromachining mechanism, the formation mechanism, and control methods of burrs and effects of the processing parameters, and then it gives the examples of fabricating typical microstructures. Finally, some future works are included.

Original language	English
Title of host publication	Microfabrication and Precision Engineering
Subtitle of host publication	Research and Development
Publisher	Elsevier Inc.
Pages	69-98
Number of pages	30
ISBN (Electronic)	9780857094865
ISBN (Print)	9780857094858
DOIs	https://doi.org/10.1016/B978-0-85709-485-8.00003-6
State	Published - 2017

Keywords

Diamond tip
Micromachining
Micromilling
Orbital motion

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10.1016/B978-0-85709-485-8.00003-6

Cite this

@inbook{8c79ef5b04e74d2bbb210f3d31d888e8,

title = "Micromachining technique based on the orbital motion of the diamond tip",

abstract = "This chapter discusses a micromechanical machining technique based on the orbital motion of the diamond tip. The chapter first describes its principle and establishment of the setup based on this idea. The chapter then studies the micromachining mechanism, the formation mechanism, and control methods of burrs and effects of the processing parameters, and then it gives the examples of fabricating typical microstructures. Finally, some future works are included.",

keywords = "Diamond tip, Micromachining, Micromilling, Orbital motion",

author = "Yan, \{Y. D.\} and B. Xue and Zhao, \{X. S.\}",

year = "2017",

doi = "10.1016/B978-0-85709-485-8.00003-6",

language = "英语",

isbn = "9780857094858",

pages = "69--98",

booktitle = "Microfabrication and Precision Engineering",

publisher = "Elsevier Inc.",

address = "美国",

}

TY - CHAP

T1 - Micromachining technique based on the orbital motion of the diamond tip

AU - Yan, Y. D.

AU - Xue, B.

AU - Zhao, X. S.

PY - 2017

Y1 - 2017

N2 - This chapter discusses a micromechanical machining technique based on the orbital motion of the diamond tip. The chapter first describes its principle and establishment of the setup based on this idea. The chapter then studies the micromachining mechanism, the formation mechanism, and control methods of burrs and effects of the processing parameters, and then it gives the examples of fabricating typical microstructures. Finally, some future works are included.

AB - This chapter discusses a micromechanical machining technique based on the orbital motion of the diamond tip. The chapter first describes its principle and establishment of the setup based on this idea. The chapter then studies the micromachining mechanism, the formation mechanism, and control methods of burrs and effects of the processing parameters, and then it gives the examples of fabricating typical microstructures. Finally, some future works are included.

KW - Diamond tip

KW - Micromachining

KW - Micromilling

KW - Orbital motion

UR - https://www.scopus.com/pages/publications/85012009192

U2 - 10.1016/B978-0-85709-485-8.00003-6

DO - 10.1016/B978-0-85709-485-8.00003-6

M3 - 章节

AN - SCOPUS:85012009192

SN - 9780857094858

SP - 69

EP - 98

BT - Microfabrication and Precision Engineering

PB - Elsevier Inc.

ER -

Micromachining technique based on the orbital motion of the diamond tip

Abstract

Keywords

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