Micromachined accelerometer with frame structure

A novel differential capacitive accelerometer with a frame-mass structure is presented in the paper. The equivalent circuit model of the accelerometer is simulated with the software SPICE. The accelerometer with the frame-mass can increase the effectual static capacitance. The micro-accelerometer, with the size of 2800×3000×60νm, the static capacitance of 3.618pf, and the inertial mass of 0.14mg, can be implemented in closed-loop system efficiently, and endure overload of 5000g or above. Through the systematic simulation, the accelerometer with the sensitivity of 75mv/g, the full-scale range of 0∼50g and the system bandwidth of 10 KHz, is supplied with the voltage of 18V.