Abstract
A novel ceramic process based on ultra-thick UV-lithography technique was proposed. The excellent temperature property of ceramic parts offers great future in the applications of microengine fields. And the aspect ratio of 13:1 micro ceramic structure has been achieved successfully based on this process.
| Original language | English |
|---|---|
| Pages (from-to) | 1233-1234+1242 |
| Journal | Zhongguo Jixie Gongcheng/China Mechanical Engineering |
| Volume | 16 |
| Issue number | 14 |
| State | Published - 25 Jul 2005 |
Keywords
- Microengine
- Microfabrication process of ceramic
- Microrocket
- Temperature property
- UV-LIGA
Fingerprint
Dive into the research topics of 'Microengine and microrocket based on UV-LIGA processes'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver