@inproceedings{00c0f96c691b45cdaf388e952d6c93ad,
title = "Micro-EDM milling of micro platinum hemisphere",
abstract = "Micro-EDM milling has become one of the powerful means of 3D micromachining for MEMS. However, for micro-EDM milling, there isn't a general electrode wear compensation strategy matched to arbitrary materials of workpiece and electrode. In this paper, the machinability of platinum metal is evaluated by taking latent heat of fusion and evaporation into account firstly. And then, a general electrode wear compensation strategy based on above-mentioned evaluation is proposed. The two characters of this strategy are employing an unequal thickness lamination for milling path and using a fixed flat surface as compensation reference. As a result, a {\O}100 μm micro platinum hemisphere is machined successfully. The surface quality of the platinum hemisphere is better than that of micro steel hemisphere. It is proved that platinum is feasible to be machined by micro-EDM.",
keywords = "General electrode wear compensation strategy, Micro hemisphere, Micro-EDM milling, Platinum",
author = "Guanrong Hang and Guohui Cao and Zaicheng Wang and Jing Tang and Zhenlong Wang and Wansheng Zhao",
year = "2006",
doi = "10.1109/NEMS.2006.334849",
language = "英语",
isbn = "1424401402",
series = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",
pages = "579--584",
booktitle = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",
note = "1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS ; Conference date: 18-01-2006 Through 21-01-2006",
}