Micro-EDM and micro-USM combined milling of ZrB₂-SiC-graphite composite for 3D micro-cavities

The ZrB₂-SiC-graphite composite is one of the most promising ceramics, which show significant potential in manufacturing parts served in ultra-high temperature. Micro-electrical discharge machining (micro-EDM) is an effective method in machining this conductive hard ceramic. However, the recast layer characterized by craters and micro-cracks is formed on the machined surface, resulting in poor surface quality. In this paper, micro-EDM and micro-ultrasonic machining (micro-USM) combined milling is proposed for manufacturing 3D micro-cavities in the ZrB₂-SiC-graphite composite. The micro-cavity is firstly machined by micro-EDM milling, followed by micro-USM finish milling to remove the recast layer in the same system without changing the micro-tool. The machining performances are investigated with consideration of the surface topography and finishing depth. It is found that the more recast layer is removed when a higher ultrasonic amplitude, larger abrasive grain size, and lower tool feedrate are employed. Based on the preliminary experiments, the proper machining parameters are obtained and applied to the fabrication of micro-cavities. The machining results show that the surface quality is improved with the low surface roughness and absence of defect layer. Meanwhile, the high machining accuracy in the depth direction and processing efficiency are achieved. It is verified that the micro-EDM and micro-USM combined milling process is feasible for fabricating 3D micro-cavities in the ZrB₂-SiC-graphite composite.