Method of micro hole tilt adjustment based on a vision-guided touch probe

In order to meet the increasing miniaturization and high precision requirements of high-performance devices in aerospace and other fields for space array micro holes with a high aspect ratio, a method of measuring geometric parameters by penetrating the micro holes with a contact probe guided by vision is proposed, which can achieve rapid and efficient measurements. This method adopts the principle of vision measurement, preliminarily determines the geometric parameters of measurement through the processing of micropore images, and then needs to establish a collaborative measurement model of vision and probe using the principle of vision to guide the probe to go deep into the hole to measure and adjust the inclined micropores. According to this principle, a five-axis measuring system is set up, and a hole with a diameter of 3 mm is tested at different angles. The experimental results preliminarily verify the effectiveness and feasibility of the proposed method.