Metastable atom and electron density diagnostic in the initial stage of a pulsed discharge in Ar and other rare gases by emission spectroscopy

Temporal measurements of the emission intensities of the Ar 419.8 and 420.1 nm spectral lines combined with Ar plasma modeling were used to examine the metastable atom and electron density behavior in the initial stage of a pulsed dc discharge. The emission intensity measurements of these spectral lines near the start of a pulsed dc discharge in Ar demonstrated a sharp growth of metastable atom and electron densities which was dependent on the applied reduced electric fields. For lower electric fields, the sharp growth of metastable atom density started earlier than the sharp electron density growth. The reverse situation was observed for larger electric fields. This presents the possibility for controlling plasma properties which may be useful for technological applications. Similar measurements with spectral lines of corresponding transitions in other rare gases are examined.