MEMS flow sensor and its application to piezoelectric pump closed-loop control system

Xiao Ya Yang; Ya Xin Liu; Li Guo Chen; Dong Sheng Qu; Wei Bin Rong

doi:10.3969/j.issn.1673-3193.2010.03.020

MEMS flow sensor and its application to piezoelectric pump closed-loop control system

Xiao Ya Yang^*
, Ya Xin Liu
, Li Guo Chen
, Dong Sheng Qu
, Wei Bin Rong

^*Corresponding author for this work

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

A MEMS flow sensor was integrated with a PZT pump to form a closed-loop drug delivery system. Benefiting from the feedback of sensor information, the system could self-adjust the driving voltage of the PZT pump to accurately control the desired drug volume without pre-calibration. First, the structure and principle of the PZT pump were introduced briefly. Secondly, the MEMS flow sensor was presented. Thirdly, the fuzzy PID closed-loop control strategy was proposed to calculate and adjust the driving voltage in real-time. Finally, experiments with fuzzy PID closed-loop control method were carried out, and experiment results show that the drug delivery system can accurately delivery drug volume with the error smaller than 0.1μL when the desired volume is 100μL. It indicates that the pump dosing system has high reproducibility and accuracy.

Original language	English
Pages (from-to)	306-312
Number of pages	7
Journal	Zhongbei Daxue Xuebao (Ziran Kexue Ban)/Journal of North University of China (Natural Science Edition)
Volume	31
Issue number	3
DOIs	https://doi.org/10.3969/j.issn.1673-3193.2010.03.020
State	Published - Jun 2010

Keywords

Flow sensor
Fuzzy-PID
MEMS
Piezoelectric pump

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10.3969/j.issn.1673-3193.2010.03.020

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title = "MEMS flow sensor and its application to piezoelectric pump closed-loop control system",

abstract = "A MEMS flow sensor was integrated with a PZT pump to form a closed-loop drug delivery system. Benefiting from the feedback of sensor information, the system could self-adjust the driving voltage of the PZT pump to accurately control the desired drug volume without pre-calibration. First, the structure and principle of the PZT pump were introduced briefly. Secondly, the MEMS flow sensor was presented. Thirdly, the fuzzy PID closed-loop control strategy was proposed to calculate and adjust the driving voltage in real-time. Finally, experiments with fuzzy PID closed-loop control method were carried out, and experiment results show that the drug delivery system can accurately delivery drug volume with the error smaller than 0.1μL when the desired volume is 100μL. It indicates that the pump dosing system has high reproducibility and accuracy.",

keywords = "Flow sensor, Fuzzy-PID, MEMS, Piezoelectric pump",

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doi = "10.3969/j.issn.1673-3193.2010.03.020",

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AU - Yang, Xiao Ya

AU - Liu, Ya Xin

AU - Chen, Li Guo

AU - Qu, Dong Sheng

AU - Rong, Wei Bin

PY - 2010/6

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AB - A MEMS flow sensor was integrated with a PZT pump to form a closed-loop drug delivery system. Benefiting from the feedback of sensor information, the system could self-adjust the driving voltage of the PZT pump to accurately control the desired drug volume without pre-calibration. First, the structure and principle of the PZT pump were introduced briefly. Secondly, the MEMS flow sensor was presented. Thirdly, the fuzzy PID closed-loop control strategy was proposed to calculate and adjust the driving voltage in real-time. Finally, experiments with fuzzy PID closed-loop control method were carried out, and experiment results show that the drug delivery system can accurately delivery drug volume with the error smaller than 0.1μL when the desired volume is 100μL. It indicates that the pump dosing system has high reproducibility and accuracy.

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KW - Fuzzy-PID

KW - MEMS

KW - Piezoelectric pump

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MEMS flow sensor and its application to piezoelectric pump closed-loop control system

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Keywords

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