Abstract
This paper mainly presents a briefly review for recent progress in MEMS-based transmission lines for use in microwave and millimeterwave range. MEMS-based transmission lines including different transmission line structure such as membrane-supported microstrip line microstrip line, coplanar microshield transmission line. LIGA micromachined planar transmission line, micromachined waveguides and coplanar waveguide are discussed. MEMS-based transmission lines are characterized by low propagation loss, wide operation frequency band, low dispersion and high quality factor, in addition, the fabrication is compatible with traditional processing of integrated circuits(IC's). The emergence of MEMS-based transmission lines provided a solution for miniaturizing microwave system and monolithic microwave integrated circuits.
| Original language | English |
|---|---|
| Pages (from-to) | 744-750 |
| Number of pages | 7 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5116 II |
| DOIs | |
| State | Published - 2003 |
| Event | Smart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain Duration: 19 May 2003 → 21 May 2003 |
Keywords
- Microelectromachining system
- Millimeterwave
- Monolithic microwave integrated circuits
- Transmission line
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