Megasonic Power Supply Design for Precision Cleaning of Nanoimprint Stencils

In the process of nanoimprint lithography, the surface of the template is easily contaminated by various particles, such as dust and photoresist, which directly affect the accuracy and quality of the lithography process. Therefore, the cleaning of the template is particularly crucial. This paper designs a megasonic power supply for the precision cleaning of lithography molds, given the significant advantages of megasonic cleaning technology in this application. The system comprises seven main modules: main control, adjustable DC power supply, drive, power, High-frequency transformers, impedance matching, and voltage and current acquisition. The power conversion and control scheme employs an adjustable DC power module and a half-bridge inverter circuit, enabling stable and accurate control of output power at ultra-high megahertz frequencies. Additionally, the power supply utilizes a two-stage LC impedance matching network with high bandwidth and frequency tracking, ensuring efficient and uniform output of megahertz-level drive electrical signals. Verification has shown that the megasonic power supply can continuously and stably output 400W and 1-3MHz electrical signals to drive the operation of the megasonic transducer.