Measurement of micro-hole with high aspect ratio by double optical fibers coupling

Cui Jiwen; Tan Jiubin; Wang Fei; Song Chuanxi

doi:10.1117/12.813972

Measurement of micro-hole with high aspect ratio by double optical fibers coupling

Cui Jiwen^*
, Tan Jiubin
, Wang Fei
, Song Chuanxi

^*Corresponding author for this work

School of Instrumentation Science and Engineering

Harbin Institute of Technology

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

In order to measure the geometry of a micro-hole with high aspect ratio, we made the light coming out from the laser to transmit in the reversal direction by double optical fibers coupling, modeled both the energy distribution at the end of an optical fiber and the output of CCD, used zernike moment subpixel algorithm to locate the edge of an image and a compensation algorithm to improve the precision of edge location. The effectiveness of the method newly developed is verified through experiments. Experimental results indicate that the newly developed method can be used to measure the geometry of a blind hole of 2.0mm depth with a diameter of about 0.2mm using a double frequency interferometer with a repeatability uncertainty of less than 0.4μm.

Original language	English
Article number	713325
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7133
DOIs	https://doi.org/10.1117/12.813972
State	Published - 2009
Event	5th International Symposium on Instrumentation Science and Technology - Shenyang, China Duration: 15 Sep 2009 → 18 Sep 2009

Keywords

Double optical fibers coupling
Edge location
Micro-hole with high aspect ratio
Reversal transmission

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10.1117/12.813972

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title = "Measurement of micro-hole with high aspect ratio by double optical fibers coupling",

abstract = "In order to measure the geometry of a micro-hole with high aspect ratio, we made the light coming out from the laser to transmit in the reversal direction by double optical fibers coupling, modeled both the energy distribution at the end of an optical fiber and the output of CCD, used zernike moment subpixel algorithm to locate the edge of an image and a compensation algorithm to improve the precision of edge location. The effectiveness of the method newly developed is verified through experiments. Experimental results indicate that the newly developed method can be used to measure the geometry of a blind hole of 2.0mm depth with a diameter of about 0.2mm using a double frequency interferometer with a repeatability uncertainty of less than 0.4μm.",

keywords = "Double optical fibers coupling, Edge location, Micro-hole with high aspect ratio, Reversal transmission",

author = "Cui Jiwen and Tan Jiubin and Wang Fei and Song Chuanxi",

year = "2009",

doi = "10.1117/12.813972",

language = "英语",

volume = "7133",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "5th International Symposium on Instrumentation Science and Technology ; Conference date: 15-09-2009 Through 18-09-2009",

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TY - JOUR

T1 - Measurement of micro-hole with high aspect ratio by double optical fibers coupling

AU - Jiwen, Cui

AU - Jiubin, Tan

AU - Fei, Wang

AU - Chuanxi, Song

PY - 2009

Y1 - 2009

N2 - In order to measure the geometry of a micro-hole with high aspect ratio, we made the light coming out from the laser to transmit in the reversal direction by double optical fibers coupling, modeled both the energy distribution at the end of an optical fiber and the output of CCD, used zernike moment subpixel algorithm to locate the edge of an image and a compensation algorithm to improve the precision of edge location. The effectiveness of the method newly developed is verified through experiments. Experimental results indicate that the newly developed method can be used to measure the geometry of a blind hole of 2.0mm depth with a diameter of about 0.2mm using a double frequency interferometer with a repeatability uncertainty of less than 0.4μm.

AB - In order to measure the geometry of a micro-hole with high aspect ratio, we made the light coming out from the laser to transmit in the reversal direction by double optical fibers coupling, modeled both the energy distribution at the end of an optical fiber and the output of CCD, used zernike moment subpixel algorithm to locate the edge of an image and a compensation algorithm to improve the precision of edge location. The effectiveness of the method newly developed is verified through experiments. Experimental results indicate that the newly developed method can be used to measure the geometry of a blind hole of 2.0mm depth with a diameter of about 0.2mm using a double frequency interferometer with a repeatability uncertainty of less than 0.4μm.

KW - Double optical fibers coupling

KW - Edge location

KW - Micro-hole with high aspect ratio

KW - Reversal transmission

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U2 - 10.1117/12.813972

DO - 10.1117/12.813972

M3 - 会议文章

AN - SCOPUS:62449131312

SN - 0277-786X

VL - 7133

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 713325

T2 - 5th International Symposium on Instrumentation Science and Technology

Y2 - 15 September 2009 through 18 September 2009

ER -

Measurement of micro-hole with high aspect ratio by double optical fibers coupling

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Keywords

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