Measurement of line width roughness

Hong Bo Li; Wei Qian Zhao; Xue Zeng Zhao; Si Tian Gao

Measurement of line width roughness

Hong Bo Li^*
, Wei Qian Zhao
, Xue Zeng Zhao
, Si Tian Gao

^*Corresponding author for this work

Beijing Institute of Technology
National Institute of Metrology China

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The current measurement and research status on line width roughness (LWR) are summarized. The definition of LWR, advantages and disadvantages of various instruments, the LWR measurement methods, analysis and characterization parameters are discussed. The obstacles to LWR measurement are addressed as well. At the same time, the uncertainty compositions of the LWR measurement is analyzed, especially the impact factors using atomic force microscope are discussed.

Original language	English
Pages (from-to)	93-99
Number of pages	7
Journal	Jiliang Xuebao/Acta Metrologica Sinica
Volume	29
Issue number	SUPPL.
State	Published - Sep 2008

Keywords

AFM
Line edge roughness
Line width roughness
Metrology
SEM
Scatterometer

Cite this

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title = "Measurement of line width roughness",

abstract = "The current measurement and research status on line width roughness (LWR) are summarized. The definition of LWR, advantages and disadvantages of various instruments, the LWR measurement methods, analysis and characterization parameters are discussed. The obstacles to LWR measurement are addressed as well. At the same time, the uncertainty compositions of the LWR measurement is analyzed, especially the impact factors using atomic force microscope are discussed.",

keywords = "AFM, Line edge roughness, Line width roughness, Metrology, SEM, Scatterometer",

author = "Li, \{Hong Bo\} and Zhao, \{Wei Qian\} and Zhao, \{Xue Zeng\} and Gao, \{Si Tian\}",

year = "2008",

month = sep,

language = "英语",

volume = "29",

pages = "93--99",

journal = "Jiliang Xuebao/Acta Metrologica Sinica",

issn = "1000-1158",

publisher = "Chinese Society for Measurement",

number = "SUPPL.",

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TY - JOUR

T1 - Measurement of line width roughness

AU - Li, Hong Bo

AU - Zhao, Wei Qian

AU - Zhao, Xue Zeng

AU - Gao, Si Tian

PY - 2008/9

Y1 - 2008/9

N2 - The current measurement and research status on line width roughness (LWR) are summarized. The definition of LWR, advantages and disadvantages of various instruments, the LWR measurement methods, analysis and characterization parameters are discussed. The obstacles to LWR measurement are addressed as well. At the same time, the uncertainty compositions of the LWR measurement is analyzed, especially the impact factors using atomic force microscope are discussed.

AB - The current measurement and research status on line width roughness (LWR) are summarized. The definition of LWR, advantages and disadvantages of various instruments, the LWR measurement methods, analysis and characterization parameters are discussed. The obstacles to LWR measurement are addressed as well. At the same time, the uncertainty compositions of the LWR measurement is analyzed, especially the impact factors using atomic force microscope are discussed.

KW - AFM

KW - Line edge roughness

KW - Line width roughness

KW - Metrology

KW - SEM

KW - Scatterometer

UR - https://www.scopus.com/pages/publications/55149103169

M3 - 文章

AN - SCOPUS:55149103169

SN - 1000-1158

VL - 29

SP - 93

EP - 99

JO - Jiliang Xuebao/Acta Metrologica Sinica

JF - Jiliang Xuebao/Acta Metrologica Sinica

IS - SUPPL.

ER -

Measurement of line width roughness

Abstract

Keywords

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