Measurement of line-width and line-width roughness based on equivalent area

Hong Bo Li; Xue Zeng Zhao; Wei Qian Zhao

doi:10.3969/j.issn.1000-1158.2011.01.04

Measurement of line-width and line-width roughness based on equivalent area

Hong Bo Li^*
, Xue Zeng Zhao
, Wei Qian Zhao

^*Corresponding author for this work

School of Mechatronics Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A method to measure line-width and line-width roughness (LWR) is presented based on the outline feature of the step scanned by AFM. Ideally, the step cross-section along the direction of the line-width is rectangle, whose area, S, is the product of height and line-width. Actually, the outline of the step cross-section is polygonal, whose area, S₁, is equaled to S. The height of the profile scanned by AFM, H, is calculated by improving Tsai's height algorithm. So, line-with, W_e, is calculated according to S₁ and H. LWR is also calculated according to its definition as the 3σ value of line-width variation.

Original language	English
Pages (from-to)	16-19
Number of pages	4
Journal	Jiliang Xuebao/Acta Metrologica Sinica
Volume	32
Issue number	1
DOIs	https://doi.org/10.3969/j.issn.1000-1158.2011.01.04
State	Published - Jan 2011

Keywords

Atomic force microscope
Equivalent area
Linewidth
Linewidth roughness
Metrology

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10.3969/j.issn.1000-1158.2011.01.04

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title = "Measurement of line-width and line-width roughness based on equivalent area",

abstract = "A method to measure line-width and line-width roughness (LWR) is presented based on the outline feature of the step scanned by AFM. Ideally, the step cross-section along the direction of the line-width is rectangle, whose area, S, is the product of height and line-width. Actually, the outline of the step cross-section is polygonal, whose area, S1, is equaled to S. The height of the profile scanned by AFM, H, is calculated by improving Tsai's height algorithm. So, line-with, We, is calculated according to S1 and H. LWR is also calculated according to its definition as the 3σ value of line-width variation.",

keywords = "Atomic force microscope, Equivalent area, Linewidth, Linewidth roughness, Metrology",

author = "Li, \{Hong Bo\} and Zhao, \{Xue Zeng\} and Zhao, \{Wei Qian\}",

year = "2011",

month = jan,

doi = "10.3969/j.issn.1000-1158.2011.01.04",

language = "英语",

volume = "32",

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journal = "Jiliang Xuebao/Acta Metrologica Sinica",

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T1 - Measurement of line-width and line-width roughness based on equivalent area

AU - Li, Hong Bo

AU - Zhao, Xue Zeng

AU - Zhao, Wei Qian

PY - 2011/1

Y1 - 2011/1

N2 - A method to measure line-width and line-width roughness (LWR) is presented based on the outline feature of the step scanned by AFM. Ideally, the step cross-section along the direction of the line-width is rectangle, whose area, S, is the product of height and line-width. Actually, the outline of the step cross-section is polygonal, whose area, S1, is equaled to S. The height of the profile scanned by AFM, H, is calculated by improving Tsai's height algorithm. So, line-with, We, is calculated according to S1 and H. LWR is also calculated according to its definition as the 3σ value of line-width variation.

AB - A method to measure line-width and line-width roughness (LWR) is presented based on the outline feature of the step scanned by AFM. Ideally, the step cross-section along the direction of the line-width is rectangle, whose area, S, is the product of height and line-width. Actually, the outline of the step cross-section is polygonal, whose area, S1, is equaled to S. The height of the profile scanned by AFM, H, is calculated by improving Tsai's height algorithm. So, line-with, We, is calculated according to S1 and H. LWR is also calculated according to its definition as the 3σ value of line-width variation.

KW - Atomic force microscope

KW - Equivalent area

KW - Linewidth

KW - Linewidth roughness

KW - Metrology

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DO - 10.3969/j.issn.1000-1158.2011.01.04

M3 - 文章

AN - SCOPUS:79952798688

SN - 1000-1158

VL - 32

SP - 16

EP - 19

JO - Jiliang Xuebao/Acta Metrologica Sinica

JF - Jiliang Xuebao/Acta Metrologica Sinica

IS - 1

ER -

Measurement of line-width and line-width roughness based on equivalent area

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Keywords

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